8 lines
336 B
Plaintext
8 lines
336 B
Plaintext
Interlayer parallel plate capacitance (aF/um^2) Local interconnect Metal1 Metal2 Metal3 Metal4 Metal5
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Poly 94.1644 44.8056 24.4968 16.0552 10.0131 7.2085
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Local interconnect 114.1970 37.5647 20.7915 11.6705 8.0265
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Metal1 133.8610 34.5350 15.0275 9.4789
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Metal2 86.1861 20.3321 11.3410
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Metal3 84.0346 19.6269
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Metal4 68.3252
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