336 B
336 B
| 1 | Interlayer parallel plate capacitance (aF/um^2) | Local interconnect | Metal1 | Metal2 | Metal3 | Metal4 | Metal5 |
|---|---|---|---|---|---|---|---|
| 2 | Poly | 94.1644 | 44.8056 | 24.4968 | 16.0552 | 10.0131 | 7.2085 |
| 3 | Local interconnect | 114.1970 | 37.5647 | 20.7915 | 11.6705 | 8.0265 | |
| 4 | Metal1 | 133.8610 | 34.5350 | 15.0275 | 9.4789 | ||
| 5 | Metal2 | 86.1861 | 20.3321 | 11.3410 | |||
| 6 | Metal3 | 84.0346 | 19.6269 | ||||
| 7 | Metal4 | 68.3252 |