| 1 | Interlayer fringe capacitance (upward direction) (aF/um) | Local interconnect | Metal1 | Metal2 | Metal3 | Metal4 | Metal5 |
|---|
| 2 | Poly | 25.138 | 16.691 | 11.166 | 9.18 | 6.3505 | 6.4903 |
| 3 | Local interconnect | | 34.7 | 21.739 | 15.078 | 10.141 | 7.6366 |
| 4 | Metal1 | | | 48.193 | 26.676 | 16.421 | 12.017 |
| 5 | Metal2 | | | | 44.432 | 22.332 | 15.693 |
| 6 | Metal3 | | | | | 42.643 | 27.836 |
| 7 | Metal4 | | | | | | 46.976 |