8 lines
321 B
Plaintext
8 lines
321 B
Plaintext
|
Interlayer fringe capacitance (upward direction) (aF/um) Local interconnect Metal1 Metal2 Metal3 Metal4 Metal5
|
||
|
Poly 25.138 16.691 11.166 9.18 6.3505 6.4903
|
||
|
Local interconnect 34.7 21.739 15.078 10.141 7.6366
|
||
|
Metal1 48.193 26.676 16.421 12.017
|
||
|
Metal2 44.432 22.332 15.693
|
||
|
Metal3 42.643 27.836
|
||
|
Metal4 46.976
|