865 B
865 B
1 | Layer / Design rule | CD | space | Comment | ||
---|---|---|---|---|---|---|
2 | Min HVNwell to any nwell space | 2 | HVNwell_Nwell_SP | |||
3 | Min HVDiff width | 0.29 | HVDiff_CD | |||
4 | Min HVDiff space | 0.3 | HVDiff_SP | |||
5 | Min HV Pmos gate width | 0.5 | HVP_gate_CD | |||
6 | Min space between HV poly | 0.28 | HVPoly_SP | |||
7 | Min HV Nmos gate width | 0.37 | HVPoly_CD | |||
8 | HV P+ Diff enclosure by Nwell | 0.33 | HVPdiff_nwell_enc | |||
9 | HV N+ diff space to Nwell | 0.43 | HVNdiff_nwell_SP | |||
10 | HV N+ tap enclosure by Nwell | 0.33 | HVNtap_nwell_enc | |||
11 | HV P+tap space to Nwell | 0.43 | HVPtap_nwell_SP | |||
12 | Photoresist tilted implant penetration | 0.02 | HVPrPenetration | |||
13 | Photoresist tilted implant blocking distance | 0.013 | HVPrBlocking | |||
14 | Min size of HVTip | 0.1 | HVTipMinSize | |||
15 | Extra CD tol for HVNTM to match Ram7 process | 0.015 | HVNTMExtraCdTol | |||
16 | Min HVDiff resistor width | 0.29 | HVDiff_Res_CD | |||
17 | High voltage n+-n+ or p+-p+ | 0.3 | HVDPTS15 | |||
18 | HV MOSFET channel length | 0.5 | HVPCD |