2.4 KiB
2.4 KiB
1 | Layer / Design rule | CD | space | Comment | ||
---|---|---|---|---|---|---|
2 | MOSFET width | 0.135 | FOMSE | |||
3 | MOSFET width in standard cells | 0.075 | FOMSESC | |||
4 | Spacing of poly on field to diff | 0.065 | PFDSE | |||
5 | Spacing of poly on field to tap | 0.005 | PFTSE | |||
6 | Enclosure of tap by nwell for pwell res | 0.22 | PTAP_NWL_SP | |||
7 | Grid conversion rounding factor | 0.005 | GRCF | |||
8 | Licon enclosure rounding | 0.02 | LICENCLR | |||
9 | LI1CD add/drop | 0.01 | 0.04 | |||
10 | Huge metal X min. W and L | 3 | HugeM | |||
11 | Min Nsdm area | 0.265 | MinNsdmArea | |||
12 | Min Psdm area | 0.255 | MinPsdmArea | |||
13 | Min N/Psdm hole area | 0.265 | MinNPsdmHole | |||
14 | Large waffle size must be divisible by 4 | 7.2 | waffle_large | |||
15 | P1M additional CD control | 0.011 | P1MCDcontrol | |||
16 | Li1 proximity correction | 0.25 | LI1PROXSpace | |||
17 | Serif added to nwell convex corner (SXX-572, 573) | 0.22 | NwellCvxSerif | |||
18 | Serif added to nwell concave corner (SXX-572, 573) | 0.12 | NwellCveSerif | |||
19 | NWM extension beyond nwell edge straddling de_nFet_source (for GSMC; QZM-133) | 0.075 | NvhvNwellExt | |||
20 | Min enclosure of pad by pmm for Cu inductor (JNET-80) | 0 | padPMMEncInd | |||
21 | Min enclosure of pmm by cu1m for Cu inductor (JNET-80) | 10.75 | pmmCu1mEncInd | |||
22 | Min enclosure of pbo by cu1m per DECA 000348 Rev S | 10 | pboCu1mEnc | |||
23 | Min enclosure of pmm by pmm2 for radio flow in the die (JNET-80) | 13 | pmmPmm2EncInd | |||
24 | Min enclosure of pmm by pmm2 inside frame | 7.5 | pmmPmm2EncIndFrame | |||
25 | Min space between pmm2 and Inductor.dg | 7.5 | pmm2IndSpc | |||
26 | Min cu1m PD across full chip | 0.35 | MinCU1Mpd | |||
27 | Max cu1m PD across full chip | 0.45 | MaxCU1Mpd | |||
28 | Spacing between RDL and outer edge of seal ring | 15 | RdlSealSpc | |||
29 | Spacing between RDL and pmm2 | 6.16 | RdlPmm2Spc | |||
30 | Enclosure of etest module in die by cpmm2 | 0 | EtestCpmm2Enc | |||
31 | Keepout of active, poly, li and metal to NSM (TCS-2253) | 1 | NSMKeepout | |||
32 | 3 um keepout of active, poly, li and metal to areaid.dt/areaid.ft (TCS-2253) | 3 | NSMKeepout_3um | |||
33 | pnp_emitter sizing (S8P GSMC flow) | 0.05 | PnpEmitterSzGSMC | |||
34 | pnp_emitter sizing (other flows) | 0.03 | PnpEmitterSz | |||
35 | MiM Capacitor aspect ration | 20 | MiM_AR | |||
36 | Min NCM space to be used to preserve NCM CL algorithm (avoid LVL error) | 1.27 | NCM_0LVL | |||
37 | Min space of NCM between core and periphery due to existing layout restriction | 0.96 | NcmCorePeriSP | |||
38 | Multiplication factor | 0.01 | S8LVconv | |||
39 | Minimum scribe width | 50 | scribew | |||
40 | spacing of p-well outside deep n-well to deep n-well mask edge | 0.12 | NWDNWENCL | |||
41 | p-well in deep n-well to p-sub | 1.2 | NWDNWOL | |||
42 | Field oxide etchback after P1ME before implants | 0.04 | WFDEL |