373 B
373 B
| 1 | Name | Description | Flags | Value |
|---|---|---|---|---|
| 2 | (tunm.1) | Min width of tunm | 0.410 | |
| 3 | (tunm.2) | Min spacing of tunm to tunm | 0.500 | |
| 4 | (tunm.3) | Extension of tunm beyond (poly and diff) | 0.095 | |
| 5 | (tunm.4) | Min spacing of tunm to (poly and diff) outside tunm | 0.095 | |
| 6 | (tunm.5) | (poly and diff) may not straddle tunm | ||
| 7 | (tunm.6a) | Tunm outside deep n-well is not allowed | TC | |
| 8 | (tunm.7) | Min tunm area | 0.672 |