9.0 KiB
9.0 KiB
| 1 | Layer name | Purpose | GDS layer:datatype | Description |
|---|---|---|---|---|
| 2 | diff | drawing, text | 65:20 | Active (diffusion) area (type opposite of well/substrate underneath) |
| 3 | tap | drawing | 65:44 | Active (diffusion) area (type equal to the well/substrate underneath) (i.e., N+ and P+) |
| 4 | nwell | drawing | 64:20 | N-well region |
| 5 | dnwell | drawing | 64:18 | Deep n-well region |
| 6 | pwbm | drawing | 19:44 | Regions (in UHVI) blocked from p-well implant (DE MOS devices only) |
| 7 | pwde | drawing | 124:20 | Regions to receive p-well drain-extended implants |
| 8 | hvtr | drawing | 18:20 | High-Vt RF transistor implant |
| 9 | hvtp | drawing | 78:44 | High-Vt LVPMOS implant |
| 10 | ldntm | drawing | 11:44 | N-tip implant on SONOS devices |
| 11 | hvi | drawing | 75:20 | High voltage (5.0V) thick oxide gate regions |
| 12 | tunm | drawing | 80:20 | SONOS device tunnel implant |
| 13 | lvtn | drawing | 125:44 | Low-Vt NMOS device |
| 14 | poly | drawing, text | 66:20 | Polysilicon |
| 15 | hvntm | drawing | 125:20 | High voltage N-tip implant |
| 16 | nsdm | drawing | 93:44 | N+ source/drain implant |
| 17 | psdm | drawing | 94:20 | P+ source/drain implant |
| 18 | rpm | drawing | 86:20 | 300 ohms/square polysilicon resistor implant |
| 19 | urpm | drawing | 79:20 | 2000 ohms/square polysilicon resistor implant |
| 20 | npc | drawing | 95:20 | Nitride poly cut (under licon1 areas) |
| 21 | licon1 | drawing | 66:44 | Contact to local interconnect |
| 22 | li1 | drawing, text | 67:20 | Local interconnect |
| 23 | mcon | drawing | 67:44 | Contact from local interconnect to metal1 |
| 24 | met1 | drawing, text | 68:20 | Metal 1 |
| 25 | via | drawing | 68:44 | Contact from metal 1 to metal 2 |
| 26 | met2 | drawing, text | 69:20 | Metal 2 |
| 27 | via2 | drawing | 69:44 | Contact from metal 2 to metal 3 |
| 28 | met3 | drawing, text | 70:20 | Metal 3 |
| 29 | via3 | drawing | 70:44 | Contact from metal 3 to metal 4 |
| 30 | met4 | drawing, text | 71:20 | Metal 4 |
| 31 | via4 | drawing | 71:44 | Contact from metal 4 to metal 5 |
| 32 | met5 | drawing, text | 72:20 | Metal 5 |
| 33 | pad | drawing, text | 76:20 | Passivation cut (opening over pads) |
| 34 | nsm | drawing | 61:20 | Nitride seal mask |
| 35 | capm | drawing | 89:44 | MiM capacitor plate over metal 3 |
| 36 | cap2m | drawing | 97:44 | MiM capacitor plate over metal 4 |
| 37 | vhvi | drawing | 74:21 | 12V nominal (16V max) node identifier |
| 38 | uhvi | drawing | 74:22 | 20V nominal node identifier |
| 39 | npn | drawing | 82:20 | Base region identifier for NPN devices |
| 40 | inductor | drawing | 82:24 | Identifier for inductor regions |
| 41 | capacitor | drawing | 82:64 | Identifier for interdigitated (vertical parallel plate (vpp)) capacitors |
| 42 | pnp | drawing | 82:44 | Base nwell region identifier for PNP devices |
| 43 | LVS prune | drawing | 84:44 | Exemption from LVS check (used in e-test modules only) |
| 44 | ncm | drawing | 92:44 | N-core implant |
| 45 | padCenter | drawing | 81:20 | Pad center marker |
| 46 | target | drawing | 76:44 | Metal fuse target |
| 47 | ||||
| 48 | areaid.sl | identifier | 81:1 | Seal ring identifier |
| 49 | areaid.ce | identifier | 81:2 | Memory (SRAM) core cell identifier |
| 50 | areaid.fe | identifier | 81:3 | Pads in padframe identifier |
| 51 | areaid.sc | identifier | 81:4 | Standard cell identifier |
| 52 | areaid.sf | identifier | 81:6 | Signal pad diffusion identifier (for latchup DRC checks) |
| 53 | areaid.sl | identifier | 81:7 | Signal pad well identifier (for latchup DRC checks) |
| 54 | areaid.sr | identifier | 81:8 | Signal pad metal (for latchup DRC checks) |
| 55 | areaid.mt | identifier | 81:10 | Location of e-test modules within the frame |
| 56 | areaid.dt | identifier | 81:11 | Location of dice within the frame |
| 57 | areaid.ft | identifier | 81:12 | Boundary of the frame |
| 58 | areaid.ww | identifier | 81:13 | Waffle window (used to prevent waffle shifting) |
| 59 | areaid.ld | identifier | 81:14 | Low tap density (15um between taps) area. Must be at least 50um from padframe |
| 60 | areaid.ns | identifier | 81:15 | Non-critical side. Blocks stress DRC rules |
| 61 | areaid.ij | identifier | 81:17 | Identification for areas susceptible to injection |
| 62 | areaid.zr | identifier | 81:18 | Zener diode identifier |
| 63 | areaid.ed | identifier | 81:19 | ESD device identifier |
| 64 | areaid.de | identifier | 81:23 | Diode identifier |
| 65 | areaid.rd | identifier | 81:24 | RDL probe pad (not used in this process) |
| 66 | areaid.dn | identifier | 81:50 | Dead zone (used in seal ring only for stress DRC) |
| 67 | areaid.cr | identifier | 81:51 | Critical corner (used in seal ring only for stress DRC) |
| 68 | areaid.cd | identifier | 81:52 | Critical side (used in seal ring only for stress DRC) |
| 69 | areaid.st | identifier | 81:53 | Substrate cut. Idendifies areas to be considered as isolated substrate |
| 70 | areaid.op | identifier | 81:54 | OPC drop. Block automatic OPC (for fab blocks and lithocal structures) |
| 71 | areaid.en | identifier | 81:57 | Extended drain identifier |
| 72 | areaid.en20 | identifier | 81:58 | 20V Extended drain identifier |
| 73 | areaid.le | identifier | 81:60 | 3.3V native NMOS identifier (absence indicates a 5V native NMOS) |
| 74 | areaid.hl | identifier | 81:63 | HV nwell. Identifies nwells with thin oxide devices connected to high voltage |
| 75 | areaid.sd | identifier | 81:70 | subcircuit identifier (for LVS extraction) |
| 76 | areaid.po | identifier | 81:81 | Photodiode device identifier |
| 77 | areaid.it | identifier | 81:84 | IP exempt from DFM rules |
| 78 | areaid.et | identifier | 81:101 | e-test module identifier |
| 79 | areaid.lvt | identifier | 81:108 | Low-Vt identifier |
| 80 | areaid.re | identifier | 81:125 | RF diode identifier |
| 81 | ||||
| 82 | fom | dummy | 22:23 | |
| 83 | ||||
| 84 | poly | gate | 66:9 | |
| 85 | ||||
| 86 | poly | model | 66:83 | (Text type) |
| 87 | ||||
| 88 | poly | resistor | 66:13 | |
| 89 | diff | resistor | 65:13 | |
| 90 | pwell | resistor | 64:13 | |
| 91 | li1 | resistor | 67:13 | |
| 92 | ||||
| 93 | diff | high voltage | 65:8 | |
| 94 | ||||
| 95 | met4 | fuse | 71:17 | |
| 96 | ||||
| 97 | inductor | terminal1 | 82:26 | |
| 98 | inductor | terminal2 | 82:27 | |
| 99 | inductor | terminal3 | 82:28 | |
| 100 | ||||
| 101 | li1 | block | 67:10 | |
| 102 | met1 | block | 68:10 | |
| 103 | met2 | block | 69:10 | |
| 104 | met3 | block | 70:10 | |
| 105 | met4 | block | 71:10 | |
| 106 | met5 | block | 72:10 | |
| 107 | ||||
| 108 | prBndry | boundary | 235:4 | |
| 109 | diff | boundary | 65:4 | |
| 110 | tap | boundary | 65:60 | |
| 111 | mcon | boundary | 67:60 | |
| 112 | poly | boundary | 66:4 | |
| 113 | via | boundary | 68:60 | |
| 114 | via2 | boundary | 69:60 | |
| 115 | via3 | boundary | 70:60 | |
| 116 | via4 | boundary | 71:60 | |
| 117 | ||||
| 118 | li1 | label | 67:5 | (Text type) |
| 119 | met1 | label | 68:5 | (Text type) |
| 120 | met2 | label | 69:5 | (Text type) |
| 121 | met3 | label | 70:5 | (Text type) |
| 122 | met4 | label | 71:5 | (Text type) |
| 123 | met5 | label | 72:5 | (Text type) |
| 124 | poly | label | 66:5 | (Text type) |
| 125 | diff | label | 65:6 | (Text type) |
| 126 | pwell | label | 64:59 | (Text and data type) |
| 127 | pwelliso | label | 44:5 | (Text type) |
| 128 | pad | label | 76:5 | (Text type) |
| 129 | tap | label | 65:5 | |
| 130 | nwell | label | 64:5 | |
| 131 | inductor | label | 82:25 | |
| 132 | ||||
| 133 | text | label | 83:44 | (Text type) |
| 134 | ||||
| 135 | li1 | net | 67:23 | (Text type) |
| 136 | met1 | net | 68:23 | (Text type) |
| 137 | met2 | net | 69:23 | (Text type) |
| 138 | met3 | net | 70:23 | (Text type) |
| 139 | met4 | net | 71:23 | (Text type) |
| 140 | met5 | net | 72:23 | (Text type) |
| 141 | poly | net | 66:23 | (Text type) |
| 142 | diff | net | 65:23 | (Text type) |
| 143 | ||||
| 144 | li1 | pin | 67:16 | (Text and data) |
| 145 | met1 | pin | 68:16 | (Text and data) |
| 146 | met2 | pin | 69:16 | (Text and data) |
| 147 | met3 | pin | 70:16 | (Text and data) |
| 148 | met4 | pin | 71:16 | (Text and data) |
| 149 | met5 | pin | 72:16 | (Text and data) |
| 150 | poly | pin | 66:16 | (Text and data) |
| 151 | diff | pin | 65:16 | (Text and data) |
| 152 | nwell | pin | 64:16 | (Text type) |
| 153 | pad | pin | 76:16 | (Text and data) |
| 154 | pwell | pin | 122:16 | (Text and data) |
| 155 | pwelliso | pin | 44:16 | (Text and data) |
| 156 | ||||
| 157 | nwell | pin | 64:0 | (Text type) |
| 158 | poly | pin | 66:0 | (Text type) |
| 159 | li1 | pin | 67:0 | (Text type) |
| 160 | met1 | pin | 68:0 | (Text type) |
| 161 | met2 | pin | 69:0 | (Text type) |
| 162 | met3 | pin | 70:0 | (Text type) |
| 163 | met4 | pin | 71:0 | (Text type) |
| 164 | met5 | pin | 72:0 | (Text type) |
| 165 | pad | pin | 76:0 | (Text type) |
| 166 | pwell | pin | 122:0 | (Text type) |
| 167 | ||||
| 168 | diff | cut | 65:14 | |
| 169 | poly | cut | 66:14 | |
| 170 | li1 | cut | 67:14 | |
| 171 | met1 | cut | 68:14 | |
| 172 | met2 | cut | 69:14 | |
| 173 | met3 | cut | 70:14 | |
| 174 | met4 | cut | 71:14 | |
| 175 | met5 | cut | 72:14 | |
| 176 | pwell | cut | ||
| 177 | ||||
| 178 | met5 | probe | 72:25 | |
| 179 | met4 | probe | 71:25 | |
| 180 | met3 | probe | 70:25 | |
| 181 | met2 | probe | 69:25 | |
| 182 | met1 | probe | 68:25 | |
| 183 | li1 | probe | 67:25 | |
| 184 | poly | probe | 66:25 | |
| 185 | ||||
| 186 | poly | short | 66:15 | |
| 187 | li1 | short | 67:15 | |
| 188 | met1 | short | 68:15 | |
| 189 | met2 | short | 69:15 | |
| 190 | met3 | short | 70:15 | |
| 191 | met4 | short | 71:15 | |
| 192 | met5 | short | 72:15 | |
| 193 | ||||
| 194 | Mask level data | |||
| 195 | ||||
| 196 | cncm | mask | 17:0 | N-core implant mask |
| 197 | crpm | mask | 96:0 | Resistor Protect mask |
| 198 | cpdm | mask | 37:0 | Pad mask |
| 199 | cnsm | mask | 22:0 | Nitride seal mask |
| 200 | cmm5 | mask | 59:0 | Metal 5 mask |
| 201 | cviam4 | mask | 58:0 | Via 4 mask |
| 202 | cmm4 | mask | 51:0 | Metal 4 mask |
| 203 | cviam3 | mask | 50:0 | Via 3 mask |
| 204 | cmm3 | mask | 34:0 | Metal 3 mask |
| 205 | cviam2 | mask | 44:0 | Via 2 mask |
| 206 | cmm2 | mask | 41:0 | Metal 2 mask |
| 207 | cviam | mask | 40:0 | Via mask |
| 208 | cmm1 | mask | 36:0 | Metal 1 mask |
| 209 | ctm1 | mask | 35:0 | Contact mask |
| 210 | cli1m | mask | 56:0 | Local interconnect mask |
| 211 | clicm1 | mask | 43:0 | Local interconnect contact mask |
| 212 | cpsdm | mask | 32:0 | P+ Implant mask |
| 213 | cnsdm | mask | 30:0 | N+ Implant mask |
| 214 | cldntm | mask | 11:0 | Lightly-doped N-tip implant mask |
| 215 | cnpc | mask | 49:0 | Nitride poly cut mask |
| 216 | chvntm | mask | 39:0 | High voltage N-tip implant mask |
| 217 | cntm | mask | 27:0 | N-tip implant mask |
| 218 | cp1m | mask | 28:0 | Poly 1 mask |
| 219 | clvom | mask | 46:0 | Low Voltage oxide mask |
| 220 | conom | mask | 88:0 | ONO Mask |
| 221 | ctunm | mask | 20:0 | Tunnel mask |
| 222 | chvtrm | mask | 98:0 | HLow VT PCh Radio mask |
| 223 | chvtpm | mask | 97:0 | High Vt Pch mask |
| 224 | clvtnm | mask | 25:0 | Low Vt Nch mask |
| 225 | cnwm | mask | 21:0 | Nwell mask |
| 226 | cdnm | mask | 48:0 | Deep nwell mask |
| 227 | cfom | mask | 23:0 | Field oxide mask |
| 228 | ||||
| 229 | cfom | drawing | 22:20 | |
| 230 | clvtnm | drawing | 25:44 | |
| 231 | chvtpm | drawing | 88:44 | |
| 232 | conom | drawing | 87:44 | |
| 233 | clvom | drawing | 45:20 | |
| 234 | cntm | drawing | 26:20 | |
| 235 | chvntm | drawing | 38:20 | |
| 236 | cnpc | drawing | 44:20 | |
| 237 | cnsdm | drawing | 29:20 | |
| 238 | cpsdm | drawing | 31:20 | |
| 239 | cli1m | drawing | 115:44 | |
| 240 | cviam3 | drawing | 112:20 | |
| 241 | cviam4 | drawing | 117:20 | |
| 242 | cncm | drawing | 96:44 | |
| 243 | ||||
| 244 | cntm | mask add | 26:21 | |
| 245 | clvtnm | mask add | 25:43 | |
| 246 | chvtpm | mask add | 97:43 | |
| 247 | cli1m | mask add | 115:43 | |
| 248 | clicm1 | mask add | 106:43 | |
| 249 | cpsdm | mask add | 31:21 | |
| 250 | cnsdm | mask add | 29:21 | |
| 251 | cp1m | mask add | 33:43 | |
| 252 | cfom | mask add | 22:21 | |
| 253 | ||||
| 254 | cntm | mask drop | 26:22 | |
| 255 | clvtnm | mask drop | 25:42 | |
| 256 | chvtpm | mask drop | 97:42 | |
| 257 | cli1m | mask drop | 115:42 | |
| 258 | clicm1 | mask drop | 106:42 | |
| 259 | cpsdm | mask drop | 31:22 | |
| 260 | cnsdm | mask drop | 29:22 | |
| 261 | cp1m | mask drop | 33:42 | |
| 262 | cfom | mask drop | 22:22 | |
| 263 | ||||
| 264 | cmm4 | waffle drop | 112:4 | |
| 265 | cmm3 | waffle drop | 107:24 | |
| 266 | cmm2 | waffle drop | 105:52 | |
| 267 | cmm1 | waffle drop | 62:24 | |
| 268 | cp1m | waffle drop | 33:24 | |
| 269 | cfom | waffle drop | 22:24 | |
| 270 | cmm5 | waffle drop | 117:4 |