895 B
895 B
| 1 | Value (um) | Variable name | ||||
|---|---|---|---|---|---|---|
| 2 | Min. spac. of laser spot to diffused junction to ensure jct integrity | 0.6 | XLASJUN | |||
| 3 | Max. width of a metal fuse line that can be removed reliably | 0.8 | FSW | |||
| 4 | Min. L of met. fuse at which damage doesn't extend beyond ends | 6.605 | FSLE | |||
| 5 | Max. extension of met2 beyond fuse boundary | 0.005 | FEXT | |||
| 6 | Min. distance between laser spot and active junction | 0.545 | LASJCT | |||
| 7 | Standard contact bottom CD | 0.09 | ||||
| 8 | Positioning tolerance of laser spot (3 s) | 0.3 | LASMA | |||
| 9 | Nominal effective laser spot diameter | 3.5 | LASSPT | |||
| 10 | Max. increase in spot diameter at max. distance from focus (3 s) | 0.9 | LASCDTOL | |||
| 11 | Fuse melting radius | 3.6 | MELTRAD | |||
| 12 | Melting related crack size in ILD | 0.36 | FUSECRACK | |||
| 13 | Min space between fuse and any feature not connected to it | 0.2 | MinFuseSpace | |||
| 14 | Space between fuse and any unrelated layer | 0.5 | SP_fuse_to_unrelated | |||
| 15 | DC offset in some fuse rules | 0.87 | LASDC1 |