2.3 KiB
2.3 KiB
| 1 | Layer Name | Feature Size | Space Size | Feature Name | Space Name | |
|---|---|---|---|---|---|---|
| 2 | Field Oxide | 0.14 | 0.27 | FOMCD | FOMCDSP | |
| 3 | Deep N-Well | 3 | 6.3 | DNMCD | DNMCDSP | |
| 4 | P-Well Block Mask | 0.84 | 1.27 | PWBMCD | PWBMCDSP | |
| 5 | P-Well Drain Extended | 0.84 | 1.27 | PWDEMCD | PWDEMCDSP | |
| 6 | N-Well | 0.84 | 1.27 | NWMCD | NWMCDSP | |
| 7 | High Vt PCh | 0.38 | 0.38 | HVTPMCD | HVTPMCDSP | |
| 8 | Low Vt Nch | 0.38 | 0.38 | LVTNMCD | LVTNMCDSP | |
| 9 | HLow VT PCh Radio | 0.38 | 0.38 | HVTRMCD | HVTRMCDSP | |
| 10 | N-Core Implant | 0.38 | 0.38 | NCMCD | NCMCDSP | |
| 11 | Tunnel Mask | 0.41 | 0.5 | TUNMCD | TUNMCDSP | |
| 12 | ONO Mask | 0.41 | 0.5 | ONOMCD | ONOMCDSP | |
| 13 | Low Voltage Oxide | 0.6 | 0.7 | LVOMCD | LVOMCDSPCSMC | |
| 14 | Resistor Protect | 1.27 | 0.84 | RPMCD | RPMCDSP | |
| 15 | Poly 1 | Endcap/Gap | 0.15 | 0.21 | P1G | |
| 16 | Poly 1 | N/A | 0.14 | P1MCD | P1MCDSP | |
| 17 | N-tip Implant | 0.84 | 0.7 | NTMCD | NTMCDSP | |
| 18 | High Volt. N-tip | 0.7 | 0.7 | HVNTMCD | HVNTMCDSP | |
| 19 | Lightly Doped N-tip | 0.7 | 0.7 | LDNTMCD | LDNTMCDSP | |
| 20 | Nitride Poly Cut | 0.27 | 0.27 | NPCMCD | NPCMCDSP | |
| 21 | P+ Implant | 0.38 | 0.38 | PSDMCD | PSDMCDSP | |
| 22 | N+ Implant | 0.38 | 0.38 | NSDMCD | NSDMCDSP | |
| 23 | Local Intr Cont.1 | Slotted | 0.17 | 0.17 | LICM1SLCD | LICM1SLCDSP |
| 24 | Local Intr Cont.1 | Core | 0.19 | 0.35 | LICM1CD | LICM1CDSP |
| 25 | Local Intrcnct 1 | Core | 0.14 | 0.14 | LI1MCD | LI1MCDSP |
| 26 | Local Intrcnct 1 | 0.17 | 0.17 | LI1MCD | LI1MCDSP | |
| 27 | Contact | 0.17 | 0.19 | CTM1CD | CTM1CDSP | |
| 28 | Open Frame Mask | N/A | N/A | OFMCD | OFMCDSP | |
| 29 | Metal 1 | 0.14 | 0.14 | MM1CD | MM1CDSP | |
| 30 | Metal 1 - Cu | 0.14 | 0.14 | MM1_CuCD | MM1_CuCDSP | |
| 31 | Via | 0.15 | 0.17 | VIMCD | VIMCDSP | |
| 32 | Via - Cu | 0.18 | 0.13 | VIM_CuCD | VIM_CuCDSP | |
| 33 | Capacitor MiM | 2 | 0.84 | CAPMCD | CAPMCDSP | |
| 34 | Metal 2 | 0.14 | 0.14 | MM2CD | MM2CDSP | |
| 35 | Metal 2 - Cu | 0.14 | 0.14 | MM2_CuCD | MM2_CuCDSP | |
| 36 | Via 2-TNV | 0.28 | 0.28 | VIM2CD | VIM2CDSP | |
| 37 | Via 2-S8TM | 0.8 | 0.8 | VIM2CD | VIM2CDSP | |
| 38 | Via 2-PLM | 0.2 | 0.2 | VIM2CD | VIM2CDSP | |
| 39 | Via 2-Cu | 0.21 | 0.18 | VIM2_CuCD | VIM2_CuCDSP | |
| 40 | Metal 3-TLM | 0.36 | 0.36 | MM3CD | MM3CDSP | |
| 41 | Metal 3-S8TM | 0.8 | 0.8 | MM3CD | MM3CDSP | |
| 42 | Metal 3-PLM | 0.3 | 0.3 | MM3CD | MM3CDSP | |
| 43 | Metal 3-Cu | 0.3 | 0.3 | MM3_CuCD | MM3_CuCDSP | |
| 44 | Pad Via | 1.2 | 1.27 | VIPDMCD | VIPDMCDSP | |
| 45 | Via3-PLM | 0.2 | 0.2 | VIM3CD | VIM3CDSP | |
| 46 | Via3-Cu | 0.21 | 0.18 | VIM3_CuCD | VIM3_CuCDSP | |
| 47 | Inductor-TLM | 2.5 | 2.5 | INDMCD | INDMCDSP | |
| 48 | Metal 4 | 0.3 | 0.3 | MM4CD | MM4CDSP | |
| 49 | Metal 4-Cu | 0.3 | 0.3 | MM4_CuCD | MM4_CuCDSP | |
| 50 | Via4 | 0.8 | 0.8 | VIM4CD | VIM4CDSP | |
| 51 | Metal 5 | All flows except S8PF*/S8PIR* | 0.8 | 0.8 | MM5CD | MM5CDSP |
| 52 | Metal 5 | S8PF*/S8PIR* | 1.6 | 1.6 | MM5CD | MM5CDSP |
| 53 | Nitride Seal Mask | 3 | 4 | NSMCD | NSMCDSP | |
| 54 | Pad (scribe protect) | 2 | 1.27 | PDMCD | PDMCDSP | |
| 55 | Polyimide | 5 | 15 | PMMCD | PMMCDSP | |
| 56 | Polyimide_ExtFab | 5 | 15 | PMM[E]CD | PMM[E]CDSP | |
| 57 | DECA PBO | 10 | 10 | PBOCD | PBOCDSP | |
| 58 | Cu Inductor/Redist. | 20 | 20 | CU1MCD | CU1MCDSP | |
| 59 | Serifs | 0.1 | 0.1 | SERCD | SERCDSP |