1.3 KiB
1.3 KiB
1 | Table F4: Connectivity of Drawn and Mask Layers (1) | |||||||||||||||||
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2 | ||||||||||||||||||
3 | Deep N Well | N Well | Diff | Tap | Poly | Li1 | Capm | Met1 | Met2 | Met3 | Met4 | Met5 | rdl | |||||
4 | Deep N Well | N/A | ||||||||||||||||
5 | N Well | Over | N/A | |||||||||||||||
6 | Diff | X | X | N/A | ||||||||||||||
7 | Tap | X | Over | X | N/A | |||||||||||||
8 | Poly | X | X | X | X | N/A | ||||||||||||
9 | Li1 | X | X | Licon1 | Licon1 | Licon1 AND Npc | N/A | |||||||||||
10 | Capm | X | X | X | X | X | X | N/A | ||||||||||
11 | Met1 | X | X | X | X | X | Mcon | X | N/A | |||||||||
12 | Met2 | X | X | X | X | X | X | X | Via | N/A | ||||||||
13 | Met3 | X | X | X | X | X | X | Via2 | X | Via2 | N/A | |||||||
14 | Met4 | X | X | X | X | X | X | X | X | X | Via3 | N/A | ||||||
15 | Met5 | X | X | X | X | X | X | X | X | X | X | Via4 | N/A | |||||
16 | rdl | X | X | X | X | X | X | X | X | X | X | X | (pad AND pmm) for s8pir/s8pr2-10r flows (1) | N/A | ||||
17 | bump | X | X | X | X | X | X | X | X | X | X | X | X | pi2 AND ubm | ||||
18 | ||||||||||||||||||
19 | (1) All layerr drawn except pmm which is created as cpmm:mask over bond pads or converted into cpbo:mask | |||||||||||||||||
20 | (2) Entries in this table show the layer (or combination of layers) that act as connecting layers listed in the row/column | |||||||||||||||||
21 | headings. An X indicates that there is no direct connection between these layers. N/A is entered along the diagonal; | |||||||||||||||||
22 | Over- Layers contacted by overlapping. A layer is always connected to itself. | |||||||||||||||||
23 | (3) (Met5 AND pad AND rdl) should have one of the following sizes for LVS to work with WLCSP option: 60x60, 50x70, 60x80, and 80x80 |