skywater-pdk/docs/rules/wlcsp/deca.csv

2.6 KiB

1(cpbo.-.-)1st polyimide (mask)
2Function: Opens over the pad openings; Allows RDL layer to connect to top metal
3wlcsp.1Min cpbo diameter over bond pad passivation opening20.00
4wlcsp.2Min bond pad passivation opening to create cpbo35.00
5wlcsp.3Min enclosure of cpbo over bond pad by pad:dg7.50
6(rdl.-)Re-distribution
7Function: Re-distribution layer connects the top metal from the customer to the bumps
8x.1Polymer 1 via and RDL1 capture pad should be designed as large as possible. The shape can be a circle, octagon, oblong, or a square with rounded corners. The via is not required to be centered within the passivation opening. Any offset is acceptable as long as the minimum overlap design rules are metexempt x.3a
9x.2Fillet or “teardrop” is required between the trace and the RDL1 UBM capture pad to reduce stress and avoid 90°or acute angles which can cause over etching. If room permits, the fillet width shall be 90% of the RDL 1 UBM capture pad diameter and set back from pad shall be the same as the trace width.add teardrop
10x.3Trace width and spacing shall be made equal and maximized where possible for optimized manufacturability, reliability and improved electrical performance (minimum width and spacing shall be limited to a localized area).Best practice
11wlcsp.1Min rdl pad diameter over bond pad40.00
12wlcsp.2Min spacing between rdl and rdl larger than 30 um by 30 um and a run length > 60um15.00
13wlcsp.3cpbo (with max width of 30x30 must be enclosed by rdl by at least 10.00
14(cpmm2.-.-)2nd polyimide
15Function: 2nd polyimide layer acts as a via between RDL and UBM
16x.1Capture pads are identified by (rdl and bump) enclosing pmm2
17wlcsp.1Min spacing, no overlap, between cpbo and cpi2 on different nets25.00
18wlcsp.2Min enclosure of cpbo by cpmm2 (no straddle)15.00
19wlcsp.3Min cpmm2 pad diameter155.00
20wlcsp.4Min diameter of rdl capture pad under cpmm2235.00
21wlcsp.5Min enclosure of rdl by cpmm215.00
22wlcsp.6Minimum remaining fraction (polymer 2) size of full via size\nAdd a radius or chamfer on sharp corners of truncated 2nd polyimide via and corresponding RDL capture pad.0.5
23(ubm.-.-)Under bump metal
24Function: Layer added underneath the bump balls
251Min width of ubm (for parallel opposite edges)215.00
262pmm2 must be enclosed by ubm by atleast15.00
273Min spacing between center of ubm and outer edge of the seal ring250.00
28(bump.-.-)Bump balls for WLCSP
29Function: WLCSP bump balls
301Min width of bump (for parallel opposite edges)264.00
312Min/Max pitch spacing between bump (center to center w/2x snapGrid tolerance)400.00