skywater-pdk/docs/rules/masks.csv

1	Mask	Acronym	Used in SKY130
2	Field Oxide	FOM	X
3	Deep N-Well	DNM	X
4	P-Well Block Mask	PWBM
5	P-Well Drain Extended	PWDEM
6	N-Well*	NWM	X
7	High Vt PCh*	HVTPM	X
8	Low Vt Nch*	LVTNM	X
9	HLow VT PCh Radio*	HVTRM	X
10	N-Core Implant	NCM
11	Tunnel Mask	TUNM	X
12	ONO Mask	ONOM	X
13	Low Voltage Oxide	LVOM	X
14	Resistor Protect	RPM	X
15	Poly 1	P1M	X
16	N-tip Implant	NTM	X
17	High Volt. N-tip	HVNTM	X
18	Lightly Doped N-tip	LDNTM	X
19	Nitride Poly Cut	NPCM	X
20	P+ Implant	PSDM	X
21	N+ Implant	NSDM	X
22	Local Intr Cont.1	LICM1	X
23	Local Intrcnct 1	LI1M	X
24	Contact	CTM1	X
25	Open Frame Mask	OFM
26	Metal 1	MM1	X
27	Via	VIM	X
28	Capacitor MiM	CAPM
29	Metal 2	MM2	X
30	Via 2-TNV	VIM2
31	Via 2-S8TM	VIM2
32	Via 2-PLM	VIM2	X
33	Metal 3-TLM	MM3
34	Metal 3-S8TM	MM3
35	Metal 3-PLM	MM3	X
36	Pad Via	VIPDM
37	Via3-PLM	VIM3	X
38	Inductor-TLM	INDM
39	Metal 4	MM4	X
40	Via4	VIM4	X
41	Metal 5	MM5	X
42	Nitride Seal Mask	NSM	X
43	Pad (scribe protect)	PDM	X
44	Pad (scribe unprotect)	PDM
45	Polyimide	PMM
46	Polyimide_ExtFab	PMM[E]
47	Pad&Polyimide_ExtFab	PDMM[E]
48	DECA PBO	PBO	X
49	Cu Inductor/Redist.	CU1M	X
50	Polyimide 2 (2)	PMM2	X
51	Under Bump Metal	UBM
52	Bumps	BUMP