323 B
323 B
| 1 | Symbol | Explanation | Unit |
|---|---|---|---|
| 2 | PI | Perimeter of Interconnect | um |
| 3 | FLT | Final Layer thickness | um |
| 4 | W | Width of MOS Transistor | um |
| 5 | L | Length of MOS Transistor | um |
| 6 | A | Area of MOS Transistor gate (= W x L) | um2 |
| 7 | CA | Area of contact or via | um2 |
| 8 | SW | Sidewall area (= PI x FLT) | um2 |
| 9 | EA | Etched area (= CA for horizontal, = SW for vertical areas) | um2 |