skywater-pdk/docs/rules/summary/table-f3d-back-end-high-S8Tx.csv

1	Layer	CD	licon		li1		mcon		metal1		via		metal2		via2		metal3
2	Parameter	width	spc	enc	spc	enc	spc	enc	spc	enc	spc	enc	spc	enc	spc	enc	spc	enc
3	li1	0.170	undefined	0.000	0.170	X	X	X	X	X	X	X	X	X	X	X	X	X
4	mcon	0.170	-	-	-	0.000	0.190	X	X	X	X	X	X	X	X	X	X	X
5	metal1	0.140	-	-	-	-	-	0.03/ 0.06	0.140	X	X	X	X	X	X	X	X	X
6	via	0.150	-	-	-	-	-	-	-	0.055 / 0.085	0.170	X	X	X	X	X	X	X
7	metal2	0.140	-	-	-	-	-	-	-	-	-	0.055	0.140	X	X	X	X	X
8	via2	0.280	-	-	-	-	-	-	-	-	-	-	-	0.190	1.200	X	X	X
9	metal3	2.500	-	-	-	-	-	-	-	-	-	-	-	-	-	0.310	2.500	X
10		All enclosures in tables are nominal and do not apply to butting edges or corners.