skywater-pdk/docs/rules/wlcsp/amkor.csv

1.9 KiB

1Allowed pitchSupported flowsAllowed pitch
2400 um500 ums8p-5r\ns8p-10r*\ns8pf-10r*\ns8pfn-20r*\ns8p12-10r*\ns8spf-10r*400 um500 um
3(pi1.-.-)(pi1_500.-.-)1st polyimide layer for WLCSP
4Function: Opens over the pad openings; Allows RDL layer to connect to top metal
511Min width of pi1 (for parallel opposite edges)35.0035.00
622Min spacing between pi120.0020.00
733pi1 must be enclosed by pad by atleast7.507.50
8(rdl.-)(rdl_500.-)Re-distribution layer
9Function: Re-distribution layer connects the top metal from the customer to the bumps
1011Min width of rdl (for parallel opposite edges)10.0010.00
1122min spacing between two rdl10.0010.00
1233pi1 must be enclosed by rdl by atleast10.0010.00
13(pi2.-.-)(pi2_500.-.-)2nd polyimide layer for WLCSP
14Function: 2nd polyimide layer acts as a via between RDL and UBM
1511Min width of pi2 (for parallel opposite edges)170.00220.00
1633Min spacing, no overlap, between pi1 and pi225.0025.00
17(ubm.-.-)(ubm_500.-.-)Under bump metal
18Function: Layer added underneath the bump balls
1911Min width of ubm (for parallel opposite edges)215.00250.00
2033pi2 must be enclosed by ubm by atleast15.0015.00
2144ubm must be enclosed by rdl by atleast10.0010.00
2255Min spacing, no overlap, between pi1 and ubm10.0010.00
2366Min spacing between center of ubm and outer edge of the seal ring155.00195.00
24(bump.-.-)(bump_500.-.-)Bump balls for WLCSP
25Function: WLCSP bump balls
2611Min width of bump (for parallel opposite edges)261.00310.00
2722Min/Max pitch spacing between bump (center to center)400.00500.00
282a2aMin/Max pitch spacing between bump (center to center) across the scribeNC400.00500.00
2933Min spacing between bump and outer edge of the seal ring25.0025.00
3044Min size of Chip_extent overlapping bump.dg750 X 10001000 X 1000
3155Max size of Chip_extent overlapping bump.dg6800 X 68006800 X 6800