1 | Interlayer fringe capacitance (downward direction) (aF/um) | Poly | Local interconnect | Metal1 | Metal2 | Metal3 | Metal4 |
---|
2 | Local interconnect | 51.846 | | | | | |
3 | Metal1 | 46.724 | 59.496 | | | | |
4 | Metal2 | 41.222 | 46.277 | 67.045 | | | |
5 | Metal3 | 43.531 | 46.708 | 54.814 | 69.846 | | |
6 | Metal4 | 38.105 | 39.709 | 42.563 | 46.382 | 70.522 | |
7 | Metal5 | 39.908 | 41.147 | 43.188 | 45.592 | 54.152 | 82.819 |