2.0 KiB
2.0 KiB
| 1 | Name | Description | Flags | Value | Unit |
|---|---|---|---|---|---|
| 2 | (m4.-) | | Algorithm should flag errors, for met4, if ANY of the following is true: | An entire 700x700 window is covered by cmm4 waffleDrop, and metX PD < 70% for same window. | 80-100% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 65% for same window. | 60-80% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 60% for same window. | 50-60% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 50% for same window. | 40-50% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 40% for same window. | 30-40% of 700x700 window is covered by cmm4 waffleDrop, and metX PD < 30% for same window. | Exclude cells whose area is below 40Kum2. Required for IP, Recommended for Chip-level. | RC | ||
| 3 | (m4.1) | Min width of met4 | 0.300 | µm | |
| 4 | (m4.2) | Min spacing between two met4 | 0.300 | µm | |
| 5 | (m4.3) | via3 must be enclosed by met4 by atleast | AL | 0.065 | µm |
| 6 | (m4.4) | Min area of met4 (rule exempted for probe pads which are exactly 1.42um by 1.42um) | N/A | N/A | |
| 7 | (m4.4a) | Min area of met4 | 0.240 | µm² | |
| 8 | (m4.5a) | Min. spacing of features attached to or extending from huge_met4 for a distance of up to 0.400 µm to metal4 (rule not checked over non-huge met4 features) | 0.400 | µm | |
| 9 | (m4.5b) | Min. spacing of huge_met4 to metal4 excluding features checked by m4.5a | 0.400 | µm | |
| 10 | (m4.7) | Min area of meta4 holes | CU | 0.200 | µm² |
| 11 | (m4.pd.1) | Min MM4_oxide_Pattern_density | RR | 0.7 | \- |
| 12 | (m4.pd.2a) | Rule m4.pd.1 has to be checked by dividing the chip into square regions of width and length equal to … | A | 700 | µm |
| 13 | (m4.pd.2b) | Rule m4.pd.1 has to be checked by dividing the chip into steps of … | A | 70 | |
| 14 | (m4.11) | Max width of metal4 | CU | 10.000 | µm |
| 15 | (m4.12) | Add slots and remove vias and contacts if wider than….. | CU | 10.000 | |
| 16 | (m4.13) | Max pattern density (PD) of metal4; met4 overlapping pdm areas are excluded from the check | CU | 0.77 | \- |
| 17 | (m4.14) | Met4 PD window size | CU | 50.000 | µm |
| 18 | (m4.14a) | Met4 PD window step | CU | 25.000 | µm |
| 19 | (m4.15) | Via3 must be enclosed by met4 by at least… | CU | 0.060 | µm |
| 20 | (m4.16) | Min enclosure of pad by met4 | CU | 0.850 | µm |