2.2 KiB
2.2 KiB
| 1 | Name | Description | Flags | Value | Unit |
|---|---|---|---|---|---|
| 2 | (m1.-) | | Algorithm should flag errors, for met1, if ANY of the following is true: | An entire 700x700 window is covered by cmm1 waffleDrop, and metX PD < 70% for same window. | 80-100% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 65% for same window. | 60-80% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 60% for same window. | 50-60% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 50% for same window. | 40-50% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 40% for same window. | 30-40% of 700x700 window is covered by cmm1 waffleDrop, and metX PD < 30% for same window. | Exclude cells whose area is below 40Kum2. NOTE: Required for IP, Recommended for Chip-level. | RC | ||
| 3 | (m1.1) | Width of metal1 | 0.140 | µm | |
| 4 | (m1.2) | Spacing of metal1 to metal1 | 0.140 | µm | |
| 5 | (m1.3a) | Min. spacing of features attached to or extending from huge_met1 for a distance of up to 0.280 µm to metal1 (rule not checked over non-huge met1 features) | 0.280 | µm | |
| 6 | (m1.3b) | Min. spacing of huge_met1 to metal1 excluding features checked by m1.3a | 0.280 | µm | |
| 7 | (m1.4) | Mcon must be enclosed by Met1 by at least …(Rule exempted for cell names documented in rule m1.4a) | P | 0.030 | µm |
| 8 | (m1.4a) | Mcon must be enclosed by Met1 by at least (for cell names "s8cell_ee_plus_sseln_a", "s8cell_ee_plus_sseln_b", "s8cell_ee_plus_sselp_a", "s8cell_ee_plus_sselp_b", "s8fpls_pl8", and "s8fs_cmux4_fm") | P | 0.005 | µm |
| 9 | (m1.5) | Mcon must be enclosed by Met1 on one of two adjacent sides by at least … | P AL | 0.060 | µm |
| 10 | (m1.6) | Min metal 1 area | 0.083 | µm² | |
| 11 | (m1.7) | Min area of metal1 holes | 0.140 | µm² | |
| 12 | (m1.pd.1) | Min MM1_oxide_Pattern_density | RR AL | 0.7 | \- |
| 13 | (m1.pd.2a) | Rule m1.pd.1 has to be checked by dividing the chip into square regions of width and length equal to … | A AL | 700 | µm |
| 14 | (m1.pd.2b) | Rule m1.pd.1 has to be checked by dividing the chip into steps of … | A AL | 70 | |
| 15 | (m1.11) | Max width of metal1after slotting | CU NC | 4.000 | µm |
| 16 | (m1.12) | Add slots and remove vias and contacts if met1 wider than….. | CU | 3.200 | |
| 17 | (m1.13) | Max pattern density (PD) of met1 | CU | 0.77 | \- |
| 18 | (m1.14) | Met1 PD window size | CU | 50.000 | µm |
| 19 | (m1.14a) | Met1 PD window step | CU | 25.000 | µm |
| 20 | (m1.15) | Mcon must be enclosed by met1 on one of two adjacent sides by at least … | CU | 0.030 | µm |