9.0 KiB
9.0 KiB
1 | Layer name | Purpose | GDS layer:datatype | Description |
---|---|---|---|---|
2 | diff | drawing, text | 65:20 | Active (diffusion) area (type opposite of well/substrate underneath) |
3 | tap | drawing | 65:44 | Active (diffusion) area (type equal to the well/substrate underneath) (i.e., N+ and P+) |
4 | nwell | drawing | 64:20 | N-well region |
5 | dnwell | drawing | 64:18 | Deep n-well region |
6 | pwbm | drawing | 19:44 | Regions (in UHVI) blocked from p-well implant (DE MOS devices only) |
7 | pwde | drawing | 124:20 | Regions to receive p-well drain-extended implants |
8 | hvtr | drawing | 18:20 | High-Vt RF transistor implant |
9 | hvtp | drawing | 78:44 | High-Vt LVPMOS implant |
10 | ldntm | drawing | 11:44 | N-tip implant on SONOS devices |
11 | hvi | drawing | 75:20 | High voltage (5.0V) thick oxide gate regions |
12 | tunm | drawing | 80:20 | SONOS device tunnel implant |
13 | lvtn | drawing | 125:44 | Low-Vt NMOS device |
14 | poly | drawing, text | 66:20 | Polysilicon |
15 | hvntm | drawing | 125:20 | High voltage N-tip implant |
16 | nsdm | drawing | 93:44 | N+ source/drain implant |
17 | psdm | drawing | 94:20 | P+ source/drain implant |
18 | rpm | drawing | 86:20 | 300 ohms/square polysilicon resistor implant |
19 | urpm | drawing | 79:20 | 2000 ohms/square polysilicon resistor implant |
20 | npc | drawing | 95:20 | Nitride poly cut (under licon1 areas) |
21 | licon1 | drawing | 66:44 | Contact to local interconnect |
22 | li1 | drawing, text | 67:20 | Local interconnect |
23 | mcon | drawing | 67:44 | Contact from local interconnect to metal1 |
24 | met1 | drawing, text | 68:20 | Metal 1 |
25 | via | drawing | 68:44 | Contact from metal 1 to metal 2 |
26 | met2 | drawing, text | 69:20 | Metal 2 |
27 | via2 | drawing | 69:44 | Contact from metal 2 to metal 3 |
28 | met3 | drawing, text | 70:20 | Metal 3 |
29 | via3 | drawing | 70:44 | Contact from metal 3 to metal 4 |
30 | met4 | drawing, text | 71:20 | Metal 4 |
31 | via4 | drawing | 71:44 | Contact from metal 4 to metal 5 |
32 | met5 | drawing, text | 72:20 | Metal 5 |
33 | pad | drawing, text | 76:20 | Passivation cut (opening over pads) |
34 | nsm | drawing | 61:20 | Nitride seal mask |
35 | capm | drawing | 89:44 | MiM capacitor plate over metal 3 |
36 | cap2m | drawing | 97:44 | MiM capacitor plate over metal 4 |
37 | vhvi | drawing | 74:21 | 12V nominal (16V max) node identifier |
38 | uhvi | drawing | 74:22 | 20V nominal node identifier |
39 | npn | drawing | 82:20 | Base region identifier for NPN devices |
40 | inductor | drawing | 82:24 | Identifier for inductor regions |
41 | capacitor | drawing | 82:64 | Identifier for interdigitated (vertical parallel plate (vpp)) capacitors |
42 | pnp | drawing | 82:44 | Base nwell region identifier for PNP devices |
43 | LVS prune | drawing | 84:44 | Exemption from LVS check (used in e-test modules only) |
44 | ncm | drawing | 92:44 | N-core implant |
45 | padCenter | drawing | 81:20 | Pad center marker |
46 | target | drawing | 76:44 | Metal fuse target |
47 | ||||
48 | areaid.sl | identifier | 81:1 | Seal ring identifier |
49 | areaid.ce | identifier | 81:2 | Memory (SRAM) core cell identifier |
50 | areaid.fe | identifier | 81:3 | Pads in padframe identifier |
51 | areaid.sc | identifier | 81:4 | Standard cell identifier |
52 | areaid.sf | identifier | 81:6 | Signal pad diffusion identifier (for latchup DRC checks) |
53 | areaid.sl | identifier | 81:7 | Signal pad well identifier (for latchup DRC checks) |
54 | areaid.sr | identifier | 81:8 | Signal pad metal (for latchup DRC checks) |
55 | areaid.mt | identifier | 81:10 | Location of e-test modules within the frame |
56 | areaid.dt | identifier | 81:11 | Location of dice within the frame |
57 | areaid.ft | identifier | 81:12 | Boundary of the frame |
58 | areaid.ww | identifier | 81:13 | Waffle window (used to prevent waffle shifting) |
59 | areaid.ld | identifier | 81:14 | Low tap density (15um between taps) area. Must be at least 50um from padframe |
60 | areaid.ns | identifier | 81:15 | Non-critical side. Blocks stress DRC rules |
61 | areaid.ij | identifier | 81:17 | Identification for areas susceptible to injection |
62 | areaid.zr | identifier | 81:18 | Zener diode identifier |
63 | areaid.ed | identifier | 81:19 | ESD device identifier |
64 | areaid.de | identifier | 81:23 | Diode identifier |
65 | areaid.rd | identifier | 81:24 | RDL probe pad (not used in this process) |
66 | areaid.dn | identifier | 81:50 | Dead zone (used in seal ring only for stress DRC) |
67 | areaid.cr | identifier | 81:51 | Critical corner (used in seal ring only for stress DRC) |
68 | areaid.cd | identifier | 81:52 | Critical side (used in seal ring only for stress DRC) |
69 | areaid.st | identifier | 81:53 | Substrate cut. Idendifies areas to be considered as isolated substrate |
70 | areaid.op | identifier | 81:54 | OPC drop. Block automatic OPC (for fab blocks and lithocal structures) |
71 | areaid.en | identifier | 81:57 | Extended drain identifier |
72 | areaid.en20 | identifier | 81:58 | 20V Extended drain identifier |
73 | areaid.le | identifier | 81:60 | 3.3V native NMOS identifier (absence indicates a 5V native NMOS) |
74 | areaid.hl | identifier | 81:63 | HV nwell. Identifies nwells with thin oxide devices connected to high voltage |
75 | areaid.sd | identifier | 81:70 | subcircuit identifier (for LVS extraction) |
76 | areaid.po | identifier | 81:81 | Photodiode device identifier |
77 | areaid.it | identifier | 81:84 | IP exempt from DFM rules |
78 | areaid.et | identifier | 81:101 | e-test module identifier |
79 | areaid.lvt | identifier | 81:108 | Low-Vt identifier |
80 | areaid.re | identifier | 81:125 | RF diode identifier |
81 | ||||
82 | fom | dummy | 22:23 | |
83 | ||||
84 | poly | gate | 66:9 | |
85 | ||||
86 | poly | model | 66:83 | (Text type) |
87 | ||||
88 | poly | resistor | 66:13 | |
89 | diff | resistor | 65:13 | |
90 | pwell | resistor | 64:13 | |
91 | li1 | resistor | 67:13 | |
92 | ||||
93 | diff | high voltage | 65:8 | |
94 | ||||
95 | met4 | fuse | 71:17 | |
96 | ||||
97 | inductor | terminal1 | 82:26 | |
98 | inductor | terminal2 | 82:27 | |
99 | inductor | terminal3 | 82:28 | |
100 | ||||
101 | li1 | block | 67:10 | |
102 | met1 | block | 68:10 | |
103 | met2 | block | 69:10 | |
104 | met3 | block | 70:10 | |
105 | met4 | block | 71:10 | |
106 | met5 | block | 72:10 | |
107 | ||||
108 | prBndry | boundary | 235:4 | |
109 | diff | boundary | 65:4 | |
110 | tap | boundary | 65:60 | |
111 | mcon | boundary | 67:60 | |
112 | poly | boundary | 66:4 | |
113 | via | boundary | 68:60 | |
114 | via2 | boundary | 69:60 | |
115 | via3 | boundary | 70:60 | |
116 | via4 | boundary | 71:60 | |
117 | ||||
118 | li1 | label | 67:5 | (Text type) |
119 | met1 | label | 68:5 | (Text type) |
120 | met2 | label | 69:5 | (Text type) |
121 | met3 | label | 70:5 | (Text type) |
122 | met4 | label | 71:5 | (Text type) |
123 | met5 | label | 72:5 | (Text type) |
124 | poly | label | 66:5 | (Text type) |
125 | diff | label | 65:6 | (Text type) |
126 | pwell | label | 64:59 | (Text and data type) |
127 | pwelliso | label | 44:5 | (Text type) |
128 | pad | label | 76:5 | (Text type) |
129 | tap | label | 65:5 | |
130 | nwell | label | 64:5 | |
131 | inductor | label | 82:25 | |
132 | ||||
133 | text | label | 83:44 | (Text type) |
134 | ||||
135 | li1 | net | 67:23 | (Text type) |
136 | met1 | net | 68:23 | (Text type) |
137 | met2 | net | 69:23 | (Text type) |
138 | met3 | net | 70:23 | (Text type) |
139 | met4 | net | 71:23 | (Text type) |
140 | met5 | net | 72:23 | (Text type) |
141 | poly | net | 66:23 | (Text type) |
142 | diff | net | 65:23 | (Text type) |
143 | ||||
144 | li1 | pin | 67:16 | (Text and data) |
145 | met1 | pin | 68:16 | (Text and data) |
146 | met2 | pin | 69:16 | (Text and data) |
147 | met3 | pin | 70:16 | (Text and data) |
148 | met4 | pin | 71:16 | (Text and data) |
149 | met5 | pin | 72:16 | (Text and data) |
150 | poly | pin | 66:16 | (Text and data) |
151 | diff | pin | 65:16 | (Text and data) |
152 | nwell | pin | 64:16 | (Text type) |
153 | pad | pin | 76:16 | (Text and data) |
154 | pwell | pin | 122:16 | (Text and data) |
155 | pwelliso | pin | 44:16 | (Text and data) |
156 | ||||
157 | nwell | pin | 64:0 | (Text type) |
158 | poly | pin | 66:0 | (Text type) |
159 | li1 | pin | 67:0 | (Text type) |
160 | met1 | pin | 68:0 | (Text type) |
161 | met2 | pin | 69:0 | (Text type) |
162 | met3 | pin | 70:0 | (Text type) |
163 | met4 | pin | 71:0 | (Text type) |
164 | met5 | pin | 72:0 | (Text type) |
165 | pad | pin | 76:0 | (Text type) |
166 | pwell | pin | 122:0 | (Text type) |
167 | ||||
168 | diff | cut | 65:14 | |
169 | poly | cut | 66:14 | |
170 | li1 | cut | 67:14 | |
171 | met1 | cut | 68:14 | |
172 | met2 | cut | 69:14 | |
173 | met3 | cut | 70:14 | |
174 | met4 | cut | 71:14 | |
175 | met5 | cut | 72:14 | |
176 | pwell | cut | ||
177 | ||||
178 | met5 | probe | 72:25 | |
179 | met4 | probe | 71:25 | |
180 | met3 | probe | 70:25 | |
181 | met2 | probe | 69:25 | |
182 | met1 | probe | 68:25 | |
183 | li1 | probe | 67:25 | |
184 | poly | probe | 66:25 | |
185 | ||||
186 | poly | short | 66:15 | |
187 | li1 | short | 67:15 | |
188 | met1 | short | 68:15 | |
189 | met2 | short | 69:15 | |
190 | met3 | short | 70:15 | |
191 | met4 | short | 71:15 | |
192 | met5 | short | 72:15 | |
193 | ||||
194 | Mask level data | |||
195 | ||||
196 | cncm | mask | 17:0 | N-core implant mask |
197 | crpm | mask | 96:0 | Resistor Protect mask |
198 | cpdm | mask | 37:0 | Pad mask |
199 | cnsm | mask | 22:0 | Nitride seal mask |
200 | cmm5 | mask | 59:0 | Metal 5 mask |
201 | cviam4 | mask | 58:0 | Via 4 mask |
202 | cmm4 | mask | 51:0 | Metal 4 mask |
203 | cviam3 | mask | 50:0 | Via 3 mask |
204 | cmm3 | mask | 34:0 | Metal 3 mask |
205 | cviam2 | mask | 44:0 | Via 2 mask |
206 | cmm2 | mask | 41:0 | Metal 2 mask |
207 | cviam | mask | 40:0 | Via mask |
208 | cmm1 | mask | 36:0 | Metal 1 mask |
209 | ctm1 | mask | 35:0 | Contact mask |
210 | cli1m | mask | 56:0 | Local interconnect mask |
211 | clicm1 | mask | 43:0 | Local interconnect contact mask |
212 | cpsdm | mask | 32:0 | P+ Implant mask |
213 | cnsdm | mask | 30:0 | N+ Implant mask |
214 | cldntm | mask | 11:0 | Lightly-doped N-tip implant mask |
215 | cnpc | mask | 49:0 | Nitride poly cut mask |
216 | chvntm | mask | 39:0 | High voltage N-tip implant mask |
217 | cntm | mask | 27:0 | N-tip implant mask |
218 | cp1m | mask | 28:0 | Poly 1 mask |
219 | clvom | mask | 46:0 | Low Voltage oxide mask |
220 | conom | mask | 88:0 | ONO Mask |
221 | ctunm | mask | 20:0 | Tunnel mask |
222 | chvtrm | mask | 98:0 | HLow VT PCh Radio mask |
223 | chvtpm | mask | 97:0 | High Vt Pch mask |
224 | clvtnm | mask | 25:0 | Low Vt Nch mask |
225 | cnwm | mask | 21:0 | Nwell mask |
226 | cdnm | mask | 48:0 | Deep nwell mask |
227 | cfom | mask | 23:0 | Field oxide mask |
228 | ||||
229 | cfom | drawing | 22:20 | |
230 | clvtnm | drawing | 25:44 | |
231 | chvtpm | drawing | 88:44 | |
232 | conom | drawing | 87:44 | |
233 | clvom | drawing | 45:20 | |
234 | cntm | drawing | 26:20 | |
235 | chvntm | drawing | 38:20 | |
236 | cnpc | drawing | 44:20 | |
237 | cnsdm | drawing | 29:20 | |
238 | cpsdm | drawing | 31:20 | |
239 | cli1m | drawing | 115:44 | |
240 | cviam3 | drawing | 112:20 | |
241 | cviam4 | drawing | 117:20 | |
242 | cncm | drawing | 96:44 | |
243 | ||||
244 | cntm | mask add | 26:21 | |
245 | clvtnm | mask add | 25:43 | |
246 | chvtpm | mask add | 97:43 | |
247 | cli1m | mask add | 115:43 | |
248 | clicm1 | mask add | 106:43 | |
249 | cpsdm | mask add | 31:21 | |
250 | cnsdm | mask add | 29:21 | |
251 | cp1m | mask add | 33:43 | |
252 | cfom | mask add | 22:21 | |
253 | ||||
254 | cntm | mask drop | 26:22 | |
255 | clvtnm | mask drop | 25:42 | |
256 | chvtpm | mask drop | 97:42 | |
257 | cli1m | mask drop | 115:42 | |
258 | clicm1 | mask drop | 106:42 | |
259 | cpsdm | mask drop | 31:22 | |
260 | cnsdm | mask drop | 29:22 | |
261 | cp1m | mask drop | 33:42 | |
262 | cfom | mask drop | 22:22 | |
263 | ||||
264 | cmm4 | waffle drop | 112:4 | |
265 | cmm3 | waffle drop | 107:24 | |
266 | cmm2 | waffle drop | 105:52 | |
267 | cmm1 | waffle drop | 62:24 | |
268 | cp1m | waffle drop | 33:24 | |
269 | cfom | waffle drop | 22:24 | |
270 | cmm5 | waffle drop | 117:4 |