323 B
323 B
1 | Symbol | Explanation | Unit |
---|---|---|---|
2 | PI | Perimeter of Interconnect | um |
3 | FLT | Final Layer thickness | um |
4 | W | Width of MOS Transistor | um |
5 | L | Length of MOS Transistor | um |
6 | A | Area of MOS Transistor gate (= W x L) | um2 |
7 | CA | Area of contact or via | um2 |
8 | SW | Sidewall area (= PI x FLT) | um2 |
9 | EA | Etched area (= CA for horizontal, = SW for vertical areas) | um2 |