391 B
391 B
| 1 | Layer | Resistivity (mohms/sq) |
|---|---|---|
| 2 | Poly | 48200 |
| 3 | Local interconnect | 12800 |
| 4 | Metal1 | 125 |
| 5 | Metal2 | 125 |
| 6 | Metal3 | 47 |
| 7 | Metal4 | 47 |
| 8 | Metal5 | 29 |
| 9 | Deep nwell | 2200000 |
| 10 | Pwell (in deep nwell) | 3050000 |
| 11 | Nwell | 1700000 |
| 12 | N-diffusion | 120000 |
| 13 | P-diffusion | 197000 |
| 14 | HV N-diffusion | 114000 |
| 15 | HV P-diffusion | 191000 |
| 16 | XHR poly resistor | 319800 |
| 17 | UHR poly resistor | 2000000 |
| 18 | LICON contact | 15000 |
| 19 | MCON contact | 152000 |
| 20 | VIA | 4500 |
| 21 | VIA2 | 3410 |
| 22 | VIA3 | 3410 |
| 23 | VIA4 | 380 |