8 lines
327 B
Plaintext
8 lines
327 B
Plaintext
Interlayer fringe capacitance (downward direction) (aF/um) Poly Local interconnect Metal1 Metal2 Metal3 Metal4
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Local interconnect 51.846
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Metal1 46.724 59.496
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Metal2 41.222 46.277 67.045
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Metal3 43.531 46.708 54.814 69.846
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Metal4 38.105 39.709 42.563 46.382 70.522
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Metal5 39.908 41.147 43.188 45.592 54.152 82.819
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