skywater-pdk/docs/rules/assumptions/02-mins.csv

2.3 KiB

1Layer NameFeature SizeSpace SizeFeature NameSpace Name
2Field Oxide0.140.27FOMCDFOMCDSP
3Deep N-Well36.3DNMCDDNMCDSP
4P-Well Block Mask0.841.27PWBMCDPWBMCDSP
5P-Well Drain Extended 0.841.27PWDEMCDPWDEMCDSP
6N-Well0.841.27NWMCDNWMCDSP
7High Vt PCh0.380.38HVTPMCDHVTPMCDSP
8Low Vt Nch0.380.38LVTNMCDLVTNMCDSP
9HLow VT PCh Radio0.380.38HVTRMCDHVTRMCDSP
10N-Core Implant0.380.38NCMCDNCMCDSP
11Tunnel Mask0.410.5TUNMCDTUNMCDSP
12ONO Mask0.410.5ONOMCDONOMCDSP
13Low Voltage Oxide0.60.7LVOMCDLVOMCDSPCSMC
14Resistor Protect1.270.84RPMCDRPMCDSP
15Poly 1Endcap/Gap0.150.21P1G
16Poly 1N/A0.14P1MCDP1MCDSP
17N-tip Implant0.840.7NTMCDNTMCDSP
18High Volt. N-tip0.70.7HVNTMCDHVNTMCDSP
19Lightly Doped N-tip0.70.7LDNTMCDLDNTMCDSP
20Nitride Poly Cut0.270.27NPCMCDNPCMCDSP
21P+ Implant0.380.38PSDMCDPSDMCDSP
22N+ Implant0.380.38NSDMCDNSDMCDSP
23Local Intr Cont.1Slotted0.170.17LICM1SLCDLICM1SLCDSP
24Local Intr Cont.1Core0.190.35LICM1CDLICM1CDSP
25Local Intrcnct 1Core0.140.14LI1MCDLI1MCDSP
26Local Intrcnct 10.170.17LI1MCDLI1MCDSP
27Contact0.170.19CTM1CDCTM1CDSP
28Open Frame MaskN/AN/AOFMCDOFMCDSP
29Metal 10.140.14MM1CDMM1CDSP
30Metal 1 - Cu0.140.14MM1_CuCDMM1_CuCDSP
31Via0.150.17VIMCDVIMCDSP
32Via - Cu0.180.13VIM_CuCDVIM_CuCDSP
33Capacitor MiM20.84CAPMCDCAPMCDSP
34Metal 20.140.14MM2CDMM2CDSP
35Metal 2 - Cu0.140.14MM2_CuCDMM2_CuCDSP
36Via 2-TNV0.280.28VIM2CDVIM2CDSP
37Via 2-S8TM0.80.8VIM2CDVIM2CDSP
38Via 2-PLM0.20.2VIM2CDVIM2CDSP
39Via 2-Cu0.210.18VIM2_CuCDVIM2_CuCDSP
40Metal 3-TLM0.360.36MM3CDMM3CDSP
41Metal 3-S8TM0.80.8MM3CDMM3CDSP
42Metal 3-PLM0.30.3MM3CDMM3CDSP
43Metal 3-Cu0.30.3MM3_CuCDMM3_CuCDSP
44Pad Via1.21.27VIPDMCDVIPDMCDSP
45Via3-PLM0.20.2VIM3CDVIM3CDSP
46Via3-Cu0.210.18VIM3_CuCDVIM3_CuCDSP
47Inductor-TLM2.52.5INDMCDINDMCDSP
48Metal 40.30.3MM4CDMM4CDSP
49Metal 4-Cu0.30.3MM4_CuCDMM4_CuCDSP
50Via40.80.8VIM4CDVIM4CDSP
51Metal 5All flows except S8PF*/S8PIR*0.80.8MM5CDMM5CDSP
52Metal 5S8PF*/S8PIR*1.61.6MM5CDMM5CDSP
53Nitride Seal Mask34NSMCDNSMCDSP
54Pad (scribe protect)21.27PDMCDPDMCDSP
55Polyimide515PMMCDPMMCDSP
56Polyimide_ExtFab515PMM[E]CDPMM[E]CDSP
57DECA PBO1010PBOCDPBOCDSP
58Cu Inductor/Redist.2020CU1MCDCU1MCDSP
59Serifs0.10.1SERCDSERCDSP