26 lines
540 B
Plaintext
26 lines
540 B
Plaintext
Layer Resistivity (mohms/sq)
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Poly 48200
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Local interconnect 12800
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Metal1 125
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Metal2 125
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Metal3 47
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Metal4 47
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Metal5 29
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Deep nwell 2200000
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Pwell (in deep nwell) 3050000
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Nwell 1700000
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N-diffusion 120000
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P-diffusion 197000
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HV N-diffusion 114000
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HV P-diffusion 191000
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XHR poly resistor 319800
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UHR poly resistor 2000000
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LICON contact (poly) 152000
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LICON contact (ndiff) 185000
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LICON contact (pdiff) 585000
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MCON contact 9300
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VIA 4500
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VIA2 3410
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VIA3 3410
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VIA4 380
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