332 B
332 B
| 1 | Name | Description | Flags | Value | Unit |
|---|---|---|---|---|---|
| 2 | (m5.1) | Min width of met5 | 1.600 | µm | |
| 3 | (m5.2) | Min spacing between two met5 | 1.600 | µm | |
| 4 | (m5.3) | via4 must be enclosed by met5 by atleast | 0.310 | µm | |
| 5 | (m5.4) | Min area of met5 (For all flows except SKY130PIR*/SKY130PF*, the rule is exempted for probe pads which are exactly 1.42um by 1.42um) | 4.000 | µm² |