16 lines
895 B
Plaintext
16 lines
895 B
Plaintext
,,,Value (um),,Variable name
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Min. spac. of laser spot to diffused junction to ensure jct integrity,,,0.6,,XLASJUN
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Max. width of a metal fuse line that can be removed reliably,,,0.8,,FSW
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Min. L of met. fuse at which damage doesn't extend beyond ends,,,6.605,,FSLE
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Max. extension of met2 beyond fuse boundary,,,0.005,,FEXT
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Min. distance between laser spot and active junction,,,0.545,,LASJCT
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Standard contact bottom CD,,,0.09,,
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Positioning tolerance of laser spot (3 s),,,0.3,,LASMA
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Nominal effective laser spot diameter,,,3.5,,LASSPT
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Max. increase in spot diameter at max. distance from focus (3 s),,,0.9,,LASCDTOL
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Fuse melting radius,,,3.6,,MELTRAD
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Melting related crack size in ILD,,,0.36,,FUSECRACK
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Min space between fuse and any feature not connected to it,,,0.2,,MinFuseSpace
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Space between fuse and any unrelated layer,,,0.5,,SP_fuse_to_unrelated
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DC offset in some fuse rules,,,0.87,,LASDC1
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