docs: Adding information about the masks used in SKY130.
Signed-off-by: Tim 'mithro' Ansell <me@mith.ro>
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@ -7,6 +7,7 @@ SkyWater SKY130 Process Design Rules
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:maxdepth: 2
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rules/background
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rules/masks
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rules/assumptions
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rules/periphery
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rules/errors
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@ -0,0 +1,52 @@
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Mask,Acronym,Used in SKY130
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Field Oxide,FOM,X
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Deep N-Well,DNM,X
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P-Well Block Mask,PWBM,
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P-Well Drain Extended ,PWDEM,
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N-Well*,NWM,X
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High Vt PCh*,HVTPM,X
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Low Vt Nch*,LVTNM,X
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HLow VT PCh Radio*,HVTRM,X
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N-Core Implant,NCM,
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Tunnel Mask,TUNM,X
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ONO Mask,ONOM,X
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Low Voltage Oxide,LVOM,X
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Resistor Protect,RPM,X
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Poly 1,P1M,X
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N-tip Implant,NTM,X
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High Volt. N-tip,HVNTM,X
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Lightly Doped N-tip,LDNTM,X
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Nitride Poly Cut,NPCM,X
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P+ Implant,PSDM,X
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N+ Implant,NSDM,X
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Local Intr Cont.1,LICM1,X
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Local Intrcnct 1,LI1M,X
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Contact,CTM1,X
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Open Frame Mask,OFM,
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Metal 1,MM1,X
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Via,VIM,X
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Capacitor MiM,CAPM,
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Metal 2,MM2,X
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Via 2-TNV,VIM2,
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Via 2-S8TM,VIM2,
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Via 2-PLM,VIM2,X
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Metal 3-TLM,MM3,
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Metal 3-S8TM,MM3,
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Metal 3-PLM,MM3,X
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Pad Via,VIPDM,
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Via3-PLM,VIM3,X
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Inductor-TLM,INDM,
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Metal 4,MM4,X
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Via4,VIM4,X
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Metal 5,MM5,X
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Nitride Seal Mask,NSM,X
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Pad (scribe protect),PDM,X
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Pad (scribe unprotect),PDM,
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Polyimide,PMM,
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Polyimide_ExtFab,PMM[E],
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Pad&Polyimide_ExtFab,PDMM[E],
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DECA PBO,PBO,X
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Cu Inductor/Redist.,CU1M,X
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Polyimide 2 (2),PMM2,X
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Under Bump Metal,UBM,
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Bumps,BUMP,
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@ -0,0 +1,14 @@
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Masks
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=====
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The :download:`masks.csv file <./masks.csv>` provides a raw information for the
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mask layers (name, acronym, usage) currently used found on 130nm processes at
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SkyWater.
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The masks which are used on the SKY130 technology node (that this PDK supports)
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are marked.
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.. csv-table:: Table - Masks
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:file: masks.csv
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:header-rows: 1
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:widths: 70, 20, 10
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