docs: Adding information about the masks used in SKY130.

Signed-off-by: Tim 'mithro' Ansell <me@mith.ro>
This commit is contained in:
Tim 'mithro' Ansell 2020-07-23 12:22:04 -07:00
parent 8de719a7bb
commit 8c11d93428
3 changed files with 67 additions and 0 deletions

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@ -7,6 +7,7 @@ SkyWater SKY130 Process Design Rules
:maxdepth: 2
rules/background
rules/masks
rules/assumptions
rules/periphery
rules/errors

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docs/rules/masks.csv Normal file
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Mask,Acronym,Used in SKY130
Field Oxide,FOM,X
Deep N-Well,DNM,X
P-Well Block Mask,PWBM,
P-Well Drain Extended ,PWDEM,
N-Well*,NWM,X
High Vt PCh*,HVTPM,X
Low Vt Nch*,LVTNM,X
HLow VT PCh Radio*,HVTRM,X
N-Core Implant,NCM,
Tunnel Mask,TUNM,X
ONO Mask,ONOM,X
Low Voltage Oxide,LVOM,X
Resistor Protect,RPM,X
Poly 1,P1M,X
N-tip Implant,NTM,X
High Volt. N-tip,HVNTM,X
Lightly Doped N-tip,LDNTM,X
Nitride Poly Cut,NPCM,X
P+ Implant,PSDM,X
N+ Implant,NSDM,X
Local Intr Cont.1,LICM1,X
Local Intrcnct 1,LI1M,X
Contact,CTM1,X
Open Frame Mask,OFM,
Metal 1,MM1,X
Via,VIM,X
Capacitor MiM,CAPM,
Metal 2,MM2,X
Via 2-TNV,VIM2,
Via 2-S8TM,VIM2,
Via 2-PLM,VIM2,X
Metal 3-TLM,MM3,
Metal 3-S8TM,MM3,
Metal 3-PLM,MM3,X
Pad Via,VIPDM,
Via3-PLM,VIM3,X
Inductor-TLM,INDM,
Metal 4,MM4,X
Via4,VIM4,X
Metal 5,MM5,X
Nitride Seal Mask,NSM,X
Pad (scribe protect),PDM,X
Pad (scribe unprotect),PDM,
Polyimide,PMM,
Polyimide_ExtFab,PMM[E],
Pad&Polyimide_ExtFab,PDMM[E],
DECA PBO,PBO,X
Cu Inductor/Redist.,CU1M,X
Polyimide 2 (2),PMM2,X
Under Bump Metal,UBM,
Bumps,BUMP,
1 Mask Acronym Used in SKY130
2 Field Oxide FOM X
3 Deep N-Well DNM X
4 P-Well Block Mask PWBM
5 P-Well Drain Extended PWDEM
6 N-Well* NWM X
7 High Vt PCh* HVTPM X
8 Low Vt Nch* LVTNM X
9 HLow VT PCh Radio* HVTRM X
10 N-Core Implant NCM
11 Tunnel Mask TUNM X
12 ONO Mask ONOM X
13 Low Voltage Oxide LVOM X
14 Resistor Protect RPM X
15 Poly 1 P1M X
16 N-tip Implant NTM X
17 High Volt. N-tip HVNTM X
18 Lightly Doped N-tip LDNTM X
19 Nitride Poly Cut NPCM X
20 P+ Implant PSDM X
21 N+ Implant NSDM X
22 Local Intr Cont.1 LICM1 X
23 Local Intrcnct 1 LI1M X
24 Contact CTM1 X
25 Open Frame Mask OFM
26 Metal 1 MM1 X
27 Via VIM X
28 Capacitor MiM CAPM
29 Metal 2 MM2 X
30 Via 2-TNV VIM2
31 Via 2-S8TM VIM2
32 Via 2-PLM VIM2 X
33 Metal 3-TLM MM3
34 Metal 3-S8TM MM3
35 Metal 3-PLM MM3 X
36 Pad Via VIPDM
37 Via3-PLM VIM3 X
38 Inductor-TLM INDM
39 Metal 4 MM4 X
40 Via4 VIM4 X
41 Metal 5 MM5 X
42 Nitride Seal Mask NSM X
43 Pad (scribe protect) PDM X
44 Pad (scribe unprotect) PDM
45 Polyimide PMM
46 Polyimide_ExtFab PMM[E]
47 Pad&Polyimide_ExtFab PDMM[E]
48 DECA PBO PBO X
49 Cu Inductor/Redist. CU1M X
50 Polyimide 2 (2) PMM2 X
51 Under Bump Metal UBM
52 Bumps BUMP

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docs/rules/masks.rst Normal file
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Masks
=====
The :download:`masks.csv file <./masks.csv>` provides a raw information for the
mask layers (name, acronym, usage) currently used found on 130nm processes at
SkyWater.
The masks which are used on the SKY130 technology node (that this PDK supports)
are marked.
.. csv-table:: Table - Masks
:file: masks.csv
:header-rows: 1
:widths: 70, 20, 10