From 8c11d934288981fbb77bfd089fe6369c3dbe9379 Mon Sep 17 00:00:00 2001 From: Tim 'mithro' Ansell Date: Thu, 23 Jul 2020 12:22:04 -0700 Subject: [PATCH] docs: Adding information about the masks used in SKY130. Signed-off-by: Tim 'mithro' Ansell --- docs/rules.rst | 1 + docs/rules/masks.csv | 52 ++++++++++++++++++++++++++++++++++++++++++++ docs/rules/masks.rst | 14 ++++++++++++ 3 files changed, 67 insertions(+) create mode 100644 docs/rules/masks.csv create mode 100644 docs/rules/masks.rst diff --git a/docs/rules.rst b/docs/rules.rst index bd1d5bd..32ad1c2 100644 --- a/docs/rules.rst +++ b/docs/rules.rst @@ -7,6 +7,7 @@ SkyWater SKY130 Process Design Rules :maxdepth: 2 rules/background + rules/masks rules/assumptions rules/periphery rules/errors diff --git a/docs/rules/masks.csv b/docs/rules/masks.csv new file mode 100644 index 0000000..9635d71 --- /dev/null +++ b/docs/rules/masks.csv @@ -0,0 +1,52 @@ +Mask,Acronym,Used in SKY130 +Field Oxide,FOM,X +Deep N-Well,DNM,X +P-Well Block Mask,PWBM, +P-Well Drain Extended ,PWDEM, +N-Well*,NWM,X +High Vt PCh*,HVTPM,X +Low Vt Nch*,LVTNM,X +HLow VT PCh Radio*,HVTRM,X +N-Core Implant,NCM, +Tunnel Mask,TUNM,X +ONO Mask,ONOM,X +Low Voltage Oxide,LVOM,X +Resistor Protect,RPM,X +Poly 1,P1M,X +N-tip Implant,NTM,X +High Volt. N-tip,HVNTM,X +Lightly Doped N-tip,LDNTM,X +Nitride Poly Cut,NPCM,X +P+ Implant,PSDM,X +N+ Implant,NSDM,X +Local Intr Cont.1,LICM1,X +Local Intrcnct 1,LI1M,X +Contact,CTM1,X +Open Frame Mask,OFM, +Metal 1,MM1,X +Via,VIM,X +Capacitor MiM,CAPM, +Metal 2,MM2,X +Via 2-TNV,VIM2, +Via 2-S8TM,VIM2, +Via 2-PLM,VIM2,X +Metal 3-TLM,MM3, +Metal 3-S8TM,MM3, +Metal 3-PLM,MM3,X +Pad Via,VIPDM, +Via3-PLM,VIM3,X +Inductor-TLM,INDM, +Metal 4,MM4,X +Via4,VIM4,X +Metal 5,MM5,X +Nitride Seal Mask,NSM,X +Pad (scribe protect),PDM,X +Pad (scribe unprotect),PDM, +Polyimide,PMM, +Polyimide_ExtFab,PMM[E], +Pad&Polyimide_ExtFab,PDMM[E], +DECA PBO,PBO,X +Cu Inductor/Redist.,CU1M,X +Polyimide 2 (2),PMM2,X +Under Bump Metal,UBM, +Bumps,BUMP, diff --git a/docs/rules/masks.rst b/docs/rules/masks.rst new file mode 100644 index 0000000..49124b1 --- /dev/null +++ b/docs/rules/masks.rst @@ -0,0 +1,14 @@ +Masks +===== + +The :download:`masks.csv file <./masks.csv>` provides a raw information for the +mask layers (name, acronym, usage) currently used found on 130nm processes at +SkyWater. + +The masks which are used on the SKY130 technology node (that this PDK supports) +are marked. + +.. csv-table:: Table - Masks + :file: masks.csv + :header-rows: 1 + :widths: 70, 20, 10