- Currents up to 500 µA/µm of width (preferred use ≤ 100 µA/µm)
Details
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The resistors have 5 different fixed widths, plus a variable W/L option.
- 0.35 (0p35)
- 0.69 (0p69)
- 1.41 (1p41)
- 2.85 (2p83)
- 5.73 (5p73)
They are modeled as subcircuits, using a conventional resistor model combined with the capacitance under the resistor, as well as matching parameters and temperature coefficients. The fixed-width resistors may only be used in the above configurations. Each resistor end is contacted using a slot licon. Length is variable and measured between the front ends of the slot licons.
The resistors are modeled using the same equations as for the P+ poly resistors. In the case of the P- poly resistors, a separate implant is used to set the sheet resistance to 2000 ohm/sq.
Fixed value resistors have the same layout footprints as their P+ poly counterparts. Electrical and e-test specs are still TBD, once sufficient silicon has been evaluated. More details on the use of the precision resistors, and their models, are in the document ***SKY130 process Family Device Models*** (002-21997), currently under development.
The symbols for the 2000 ohm/sq precision resistors are shown below: