55 lines
750 B
ReStructuredText
55 lines
750 B
ReStructuredText
.. list-table::
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:header-rows: 1
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:stub-columns: 1
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* - Parameter
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- NOM
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- LSL
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- USL
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- Units
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- Description
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* - CMIMA
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- 2
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- 1.8
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- 2.2
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- fF/µm\ :sup:`2`
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- MiM cap area capacitance
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* - CMIMP
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- 0.19
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- 0.11
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- 0.27
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- fF/µm
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- MiM cap periphery capacitance
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* - RSCAPM
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- 5.8
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- 4.8
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- 6.8
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- Ω/□
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- MiM top plate sheet resistance
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* - CMIM2A
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- 2
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- 1.8
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- 2.2
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- fF/µm\ :sup:`2`
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- MiM2 cap area capacitance
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* - CMIM2P
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- 0.19
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- 0.11
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- 0.27
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- fF/µm
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- MiM2 cap periphery capacitance
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* - RSCAPM
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- 5.8
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- 4.8
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- 6.8
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- Ω/sq
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- MiM2 top plate sheet resistance
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