1.0 KiB
1.0 KiB
1 | Name | Description | Flags | Value | Unit |
---|---|---|---|---|---|
2 | (nsm.1) | Min. width of nsm | 3.000 | µm | |
3 | (nsm.2) | Min. spacing of nsm to nsm | 4.000 | µm | |
4 | (nsm.3) | Min spacing, no overlap, between NSM_keepout to diff.dg, tap.dg, fom.dy, cfom.dg, cfom.mk, poly.dg, p1m.mk, li1.dg, cli1m.mk, metX.dg (X=1 to 5) and cmmX.mk (X=1 to 5). Exempt the following from the check: (a) cell name "nikon*" and (b) diff ring inside :drc_tag:`areaid.sl` | AL | 1.000 | µm |
5 | (nsm.3a) | Min enclosure of diff.dg, tap.dg, fom.dy, cfom.dg, cfom.mk, poly.dg, p1m.mk, li1.dg, cli1m.mk, metX.dg (X=1 to 5) and cmmX.mk (X=1 to 5) by :drc_tag:`areaid.ft`. Exempt the following from the check: (a) cell name "s8Fab_crntic*" (b) blankings in the frame (rule uses :drc_tag:`areaid.dt` for exemption) | 3.000 | µm | |
6 | (nsm.3b) | Min spacing between :drc_tag:`areaid.dt` to diff.dg, tap.dg, fom.dy, cfom.dg, cfom.mk, poly.dg, p1m.mk, li1.dg, cli1m.mk, metX.dg (X=1 to 5) and cmmX.mk (X=1 to 5). Exempt the following from the check: (a) blankings in the frame (rule uses :drc_tag:`areaid.dt` for exemption) | 3.000 | µm |