2.3 KiB
2.3 KiB
| 1 | Name | Description | Flags | Value | Unit |
|---|---|---|---|---|---|
| 2 | (m3.-) | | Algorithm should flag errors, for met3, if ANY of the following is true: | An entire 700x700 window is covered by cmm3 waffleDrop, and metX PD < 70% for same window. | 80-100% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 65% for same window. | 60-80% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 60% for same window. | 50-60% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 50% for same window. | 40-50% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 40% for same window. | 30-40% of 700x700 window is covered by cmm3 waffleDrop, and metX PD < 30% for same window. | Exclude cells whose area is below 40Kum2. NOTE: Required for IP, Recommended for Chip-level. | RC | ||
| 3 | (m3.1) | Width of metal 3 | 0.300 | µm | |
| 4 | (m3.2) | Spacing of metal 3 to metal 3 | 0.300 | µm | |
| 5 | (m3.3a) | Min. spacing of features attached to or extending from huge_met3 for a distance of up to 0.480 um to metal3 (rule not checked over non-huge met3 features) | N/A | N/A | |
| 6 | (m3.3b) | Min. spacing of huge_met3 to metal3 excluding features checked by m3.3a | N/A | N/A | |
| 7 | (m3.3c) | Min. spacing of features attached to or extending from huge_met3 for a distance of up to 0.400 µm to metal3 (rule not checked over non-huge met3 features) | 0.400 | µm | |
| 8 | (m3.3d) | Min. spacing of huge_met3 to metal3 excluding features checked by m3.3a | 0.400 | µm | |
| 9 | (m3.4) | Via2 must be enclosed by Met3 by at least … | AL | 0.065 | µm |
| 10 | (m3.5) | Via2 must be enclosed by Met3 on one of two adjacent sides by at least … | N/A | N/A | |
| 11 | (m3.5a) | Via2 must be enclosed by Met3 on all sides by at least …(Rule not checked on a layout when it satisfies both rules m3.4 and m3.5) | N/A | N/A | |
| 12 | (m3.6) | Min area of metal3 | 0.240 | µm² | |
| 13 | (m3.7) | Min area of metal3 holes | CU | 0.200 | µm² |
| 14 | (m3.pd.1) | Min MM3_oxide_Pattern_density | RR | 0.7 | \- |
| 15 | (m3.pd.2a) | Rule m3.pd.1 has to be checked by dividing the chip into square regions of width and length equal to … | A | 700 | µm |
| 16 | (m3.pd.2b) | Rule m3.pd.1 has to be checked by dividing the chip into steps of … | A | 70 | |
| 17 | (m3.11) | Max width of metal3 | CU | 4.000 | µm |
| 18 | (m3.12) | Add slots and remove vias and contacts if wider than….. | CU | 3.200 | |
| 19 | (m3.13) | Max pattern density (PD) of metal3 | CU | 0.77 | \- |
| 20 | (m3.14) | Met3 PD window size | CU | 50.000 | µm |
| 21 | (m3.14a) | Met3 PD window step | CU | 25.000 | µm |
| 22 | (m3.15) | Via2 must be enclosed by met3 by at least… | CU | 0.060 | µm |