170 lines
4.6 KiB
ReStructuredText
170 lines
4.6 KiB
ReStructuredText
Criteria & Assumptions
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======================
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Process Stack Diagram
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---------------------
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.. image:: ../_static/metal_stack.svg
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:width: 100%
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:alt: SkyWater SKY130 Process Stack
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Details about the layers can be found in :ref:`SkyWater GDS Layers Information` page.
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General
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-------
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.. csv-table:: Table 1 - General
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:file: assumptions/01-general.csv
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:header-rows: 1
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:stub-columns: 1
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Minimum Critical Dimensions
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---------------------------
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.. csv-table:: Table 2 - Minimum CDs in Design or on Wafer, required by Technology (Core or Periphery)
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:file: assumptions/02-mins.csv
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:header-rows: 1
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:widths: 20, 20, 10, 10, 10, 10
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Semiconductor Criteria
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----------------------
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Basic Parameters
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~~~~~~~~~~~~~~~~
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.. csv-table:: Table 3a - Semiconductor Criteria - Basic Parameters
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:header-rows: 1
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:width: 100%
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:widths: 30, 10, 20, 10
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,Units,Value,Variable name
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n-well peak concentration,cm-3,6.00E+017,NWPCONC
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background concentration,cm-3,8.00E+14,NWBCONC
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y.char,um,0.43,NWYCHAR
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desired Nmin/Ns ratio,,0.9,NMINNSRATIO
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min n-well width to guarantee 90 % peak concentr.,um,0.55,MINNWWID
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p-well peak concentration,cm-3,4E+017,PWPCONC
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p-well peak coordinate,um,0.42,PWPCOORD
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y.char,um,0.13,PWYCHAR
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min. p-well width to guarantee 90 % peak concentr.,um,0.33,MINPWWID
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Junction Depths
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~~~~~~~~~~~~~~~
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.. csv-table:: Table 3b - Semiconductor Criteria - Junction Depths
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:header-rows: 1
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:width: 100%
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:widths: 30, 10, 10, 10, 10
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,Units,Vertical Feature,Vertical Space,Variable name
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Baseline: N-Well,um,1.1, ,NWVDIM
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P-Well,um,0.75,,PWVDIM
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N-w/P-w junction (from drawn edge),um,*,0.034,WELLJCT
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N+ or P+ S/D (XJ),um,0.1,0.06,JCTD / LD
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Max (N+ or P+ S/D outdiff.) next to isol. edge,um,,0.007,LDST
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Max (N+ or P+ S/D outdiff.) next to isol. edge for 6 V reg. devices,,,0.05,LDST5
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N Tip (As),um, ,0.01,LDNTIP
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Other Width Criteria
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~~~~~~~~~~~~~~~~~~~~
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.. csv-table:: Table 3c - Semiconductor Criteria - Other Width Criteria
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:header-rows: 1
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:width: 100%
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:widths: 30, 10, 20, 10
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,Units,Value,Variable name
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Min. diff/tap width for reproducible resistivity,um,0.12,MINFWR
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Min. width to open a strip of tap between two diffs,um,0.34,SDM3
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"Max s/d diff width without contact, consistent w/Ram4,5,6",um,5.7,XMAXCON
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Punchthrough Criteria
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~~~~~~~~~~~~~~~~~~~~~
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.. csv-table:: Table 3d - Semiconductor Criteria - Minimum Spacing for 3.3V Punchthrough (1.8V devices)
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:header-rows: 1
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:width: 100%
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:widths: 30, 10, 20, 10
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,Units,Value,Variable name
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n-well - n-well ,um,0.835,NWPTS
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n+ - n+ or p+-p+,um,0.23,DPTS
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p+ in nwell to pwell,um,0.05,PPTS
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n+ in pwell to nwell,um,0.15,PNPTS
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Latch-up/ESD Criteria
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~~~~~~~~~~~~~~~~~~~~~
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.. csv-table:: Table 3e - Semiconductor Criteria - Latch-up/ESD Criteria
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:header-rows: 1
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:width: 100%
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:widths: 30, 10, 20, 10
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Minimum n+ or p+ - nwell spacing to prevent latch-up,um,0.23,NPNWLU
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Min n-well enclos. of tap to ensure bkdwn N-w/P-w before N+/P-w (ESD),um,0.04,XNWESD
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Max. overlap of n-well by p+ tap,um,0.06,XNWPTS
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Implant angles
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~~~~~~~~~~~~~~
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.. csv-table:: Table 3f - Semiconductor Criteria - Implant angles
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:header-rows: 1
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:width: 100%
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:widths: 30, 10, 10, 10, 10
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,Units,Angle,,Variable name
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High current,deg,0,0,HCIMPA
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Angle for tip implant ,deg,7,,TipAng
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Angle for HV tip implant ,deg,40,,HvTipAngle
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Twist angle for HV Tip ,deg,23,,HvTipTwist
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Physical Criteria
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-----------------
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.. csv-table:: Table 4 - Physical Criteria
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:file: assumptions/04-physical.csv
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:header-rows: 1
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:widths: 60, 10, 1, 10, 10, 10
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Laser Fuse Criteria
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-------------------
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.. csv-table:: Table 5 - Laser Fuse Criteria
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:file: assumptions/05-laser-fuse.csv
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:header-rows: 1
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:widths: 60, 10, 1, 10, 10, 10
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.. What happened to 6!?
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Other criteria and parameters
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-----------------------------
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.. csv-table:: Table 7 - Other criteria and parameters
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:file: assumptions/07-other.csv
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:header-rows: 1
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:widths: 60, 10, 1, 10, 10, 10
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Criteria for High Voltage FET
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-----------------------------
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.. csv-table:: Table 8 - Criteria for High Voltage FET
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:file: assumptions/08-hv.csv
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:header-rows: 1
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:widths: 60, 10, 1, 10, 10, 10
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Criteria for polyimide manufacturability
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----------------------------------------
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.. csv-table:: Table 9 - Criteria for polyimide manufacturability
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:file: assumptions/09-polyimide.csv
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:header-rows: 1
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:widths: 60, 10, 1, 10, 10, 10
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Criteria for VPP capacitor
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--------------------------
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.. csv-table:: Table 10 - Criteria for VPP capacitor
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:file: assumptions/10-vpp-capacitor.csv
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:header-rows: 1
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:widths: 60, 10, 1, 10, 10, 10
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