Interlayer fringe capacitance (upward direction) (aF/um)	Local interconnect	Metal1	Metal2	Metal3	Metal4	Metal5
Poly	25.138	16.691	11.166	9.18	6.3505	6.4903
Local interconnect		34.7	21.739	15.078	10.141	7.6366
Metal1			48.193	26.676	16.421	12.017
Metal2				44.432	22.332	15.693
Metal3					42.643	27.836
Metal4						46.976