Layer Name,,Feature Size,Space Size,Feature Name,Space Name
Field Oxide,,0.14,0.27,FOMCD,FOMCDSP
Deep N-Well,,3,6.3,DNMCD,DNMCDSP
P-Well Block Mask,,0.84,1.27,PWBMCD,PWBMCDSP
P-Well Drain Extended ,,0.84,1.27,PWDEMCD,PWDEMCDSP
N-Well,,0.84,1.27,NWMCD,NWMCDSP
High Vt PCh,,0.38,0.38,HVTPMCD,HVTPMCDSP
Low Vt Nch,,0.38,0.38,LVTNMCD,LVTNMCDSP
HLow VT PCh Radio,,0.38,0.38,HVTRMCD,HVTRMCDSP
N-Core Implant,,0.38,0.38,NCMCD,NCMCDSP
Tunnel Mask,,0.41,0.5,TUNMCD,TUNMCDSP
ONO Mask,,0.41,0.5,ONOMCD,ONOMCDSP
Low Voltage Oxide,,0.6,0.7,LVOMCD,LVOMCDSPCSMC
Resistor Protect,,1.27,0.84,RPMCD,RPMCDSP
Poly 1,Endcap/Gap,0.15,0.21,P1G,
Poly 1,,N/A,0.14,P1MCD,P1MCDSP
N-tip Implant,,0.84,0.7,NTMCD,NTMCDSP
High Volt. N-tip,,0.7,0.7,HVNTMCD,HVNTMCDSP
Lightly Doped N-tip,,0.7,0.7,LDNTMCD,LDNTMCDSP
Nitride Poly Cut,,0.27,0.27,NPCMCD,NPCMCDSP
P+ Implant,,0.38,0.38,PSDMCD,PSDMCDSP
N+ Implant,,0.38,0.38,NSDMCD,NSDMCDSP
Local Intr Cont.1,Slotted,0.17,0.17,LICM1SLCD,LICM1SLCDSP
Local Intr Cont.1,Core,0.19,0.35,LICM1CD,LICM1CDSP
Local Intrcnct 1,Core,0.14,0.14,LI1MCD,LI1MCDSP
Local Intrcnct 1,,0.17,0.17,LI1MCD,LI1MCDSP
Contact,,0.17,0.19,CTM1CD,CTM1CDSP
Open Frame Mask,,N/A,N/A,OFMCD,OFMCDSP
Metal 1,,0.14,0.14,MM1CD,MM1CDSP
Metal 1 - Cu,,0.14,0.14,MM1_CuCD,MM1_CuCDSP
Via,,0.15,0.17,VIMCD,VIMCDSP
Via - Cu,,0.18,0.13,VIM_CuCD,VIM_CuCDSP
Capacitor MiM,,2,0.84,CAPMCD,CAPMCDSP
Metal 2,,0.14,0.14,MM2CD,MM2CDSP
Metal 2 - Cu,,0.14,0.14,MM2_CuCD,MM2_CuCDSP
Via 2-TNV,,0.28,0.28,VIM2CD,VIM2CDSP
Via 2-S8TM,,0.8,0.8,VIM2CD,VIM2CDSP
Via 2-PLM, ,0.2,0.2,VIM2CD,VIM2CDSP
Via 2-Cu, ,0.21,0.18,VIM2_CuCD,VIM2_CuCDSP
Metal 3-TLM,,0.36,0.36,MM3CD,MM3CDSP
Metal 3-S8TM,,0.8,0.8,MM3CD,MM3CDSP
Metal 3-PLM,,0.3,0.3,MM3CD,MM3CDSP
Metal 3-Cu, ,0.3,0.3,MM3_CuCD,MM3_CuCDSP
Pad Via,,1.2,1.27,VIPDMCD,VIPDMCDSP
Via3-PLM,,0.2,0.2,VIM3CD,VIM3CDSP
Via3-Cu, ,0.21,0.18,VIM3_CuCD,VIM3_CuCDSP
Inductor-TLM,,2.5,2.5,INDMCD,INDMCDSP
Metal 4,,0.3,0.3,MM4CD,MM4CDSP
Metal 4-Cu, ,0.3,0.3,MM4_CuCD,MM4_CuCDSP
Via4,,0.8,0.8,VIM4CD,VIM4CDSP
Metal 5,All flows except S8PF*/S8PIR*,0.8,0.8,MM5CD,MM5CDSP
Metal 5,S8PF*/S8PIR*,1.6,1.6,MM5CD,MM5CDSP
Nitride Seal Mask,,3,4,NSMCD,NSMCDSP
Pad (scribe protect),,2,1.27,PDMCD,PDMCDSP
Polyimide,,5,15,PMMCD,PMMCDSP
Polyimide_ExtFab,,5,15,PMM[E]CD,PMM[E]CDSP
DECA PBO, ,10,10,PBOCD,PBOCDSP
Cu Inductor/Redist.,,20,20,CU1MCD,CU1MCDSP
Serifs,,0.1,0.1,SERCD,SERCDSP