Interlayer parallel plate capacitance (aF/um^2)	Local interconnect	Metal1	Metal2	Metal3	Metal4	Metal5
Poly	94.1644	44.8056	24.4968	16.0552	10.0131	7.2085
Local interconnect		114.1970	37.5647	20.7915	11.6705	8.0265
Metal1			133.8610	34.5350	15.0275	9.4789
Metal2				86.1861	20.3321	11.3410
Metal3					84.0346	19.6269
Metal4						68.3252