Interlayer fringe capacitance (downward direction) (aF/um)	Poly	Local interconnect	Metal1	Metal2	Metal3	Metal4
Local interconnect	51.846					
Metal1	46.724	59.496				
Metal2	41.222	46.277	67.045			
Metal3	43.531	46.708	54.814	69.846		
Metal4	38.105	39.709	42.563	46.382	70.522	
Metal5	39.908	41.147	43.188	45.592	54.152	82.819