Merge pull request #89 from smunaut/add_layer

docs: Add CSV file with the GDS layer informations and comments
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Tim Ansell 2020-07-12 20:47:41 -07:00 committed by GitHub
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@ -8,6 +8,8 @@ Process Stack Diagram
:width: 100%
:alt: SkyWater SKY130 Process Stack
Details about the layers can be found in :ref:`SkyWater GDS Layers Information` page.
General
-------

270
docs/rules/gds_layers.csv Normal file
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Layer name,Purpose,GDS layer:datatype,Description
diff,"drawing, text",65:20,Active (diffusion) area (type opposite of well/substrate underneath)
tap,drawing,65:44,"Active (diffusion) area (type equal to the well/substrate underneath) (i.e., N+ and P+)"
nwell,drawing,64:20,N-well region
dnwell,drawing,64:18,Deep n-well region
pwbm,drawing,19:44,Regions (in UHVI) blocked from p-well implant (DE MOS devices only)
pwde,drawing,124:20,Regions to receive p-well drain-extended implants
hvtr,drawing,18:20,High-Vt RF transistor implant
hvtp,drawing,78:44,High-Vt LVPMOS implant
ldntm,drawing,11:44,N-tip implant on SONOS devices
hvi,drawing,75:20,High voltage (5.0V) thick oxide gate regions
tunm,drawing,80:20,SONOS device tunnel implant
lvtn,drawing,125:44,Low-Vt NMOS device
poly,"drawing, text",66:20,Polysilicon
hvntm,drawing,125:20,High voltage N-tip implant
nsdm,drawing,93:44,N+ source/drain implant
psdm,drawing,94:20,P+ source/drain implant
rpm,drawing,86:20,300 ohms/square polysilicon resistor implant
urpm,drawing,79:20,2000 ohms/square polysilicon resistor implant
npc,drawing,95:20,Nitride poly cut (under licon1 areas)
licon1,drawing,66:44,Contact to local interconnect
li1,"drawing, text",67:20,Local interconnect
mcon,drawing,67:44,Contact from local interconnect to metal1
met1,"drawing, text",68:20,Metal 1
via,drawing,68:44,Contact from metal 1 to metal 2
met2,"drawing, text",69:20,Metal 2
via2,drawing,69:44,Contact from metal 2 to metal 3
met3,"drawing, text",70:20,Metal 3
via3,drawing,70:44,Contact from metal 3 to metal 4
met4,"drawing, text",71:20,Metal 4
via4,drawing,71:44,Contact from metal 4 to metal 5
met5,"drawing, text",72:20,Metal 5
pad,"drawing, text",76:20,Passivation cut (opening over pads)
nsm,drawing,61:20,Nitride seal mask
capm,drawing,89:44,MiM capacitor plate over metal 3
cap2m,drawing,97:44,MiM capacitor plate over metal 4
vhvi,drawing,74:21,12V nominal (16V max) node identifier
uhvi,drawing,74:22,20V nominal node identifier
npn,drawing,82:20,Base region identifier for NPN devices
inductor,drawing,82:24,Identifier for inductor regions
capacitor,drawing,82:64,Identifier for interdigitated (vertical parallel plate (vpp)) capacitors
pnp,drawing,82:44,Base nwell region identifier for PNP devices
LVS prune,drawing,84:44,Exemption from LVS check (used in e-test modules only)
ncm,drawing,92:44,N-core implant
padCenter,drawing,81:20,Pad center marker
target,drawing,76:44,Metal fuse target
,,,
areaid.sl,identifier,81:1,Seal ring identifier
areaid.ce,identifier,81:2,Memory (SRAM) core cell identifier
areaid.fe,identifier,81:3,Pads in padframe identifier
areaid.sc,identifier,81:4,Standard cell identifier
areaid.sf,identifier,81:6,Signal pad diffusion identifier (for latchup DRC checks)
areaid.sl,identifier,81:7,Signal pad well identifier (for latchup DRC checks)
areaid.sr,identifier,81:8,Signal pad metal (for latchup DRC checks)
areaid.mt,identifier,81:10,Location of e-test modules within the frame
areaid.dt,identifier,81:11,Location of dice within the frame
areaid.ft,identifier,81:12,Boundary of the frame
areaid.ww,identifier,81:13,Waffle window (used to prevent waffle shifting)
areaid.ld,identifier,81:14,Low tap density (15um between taps) area. Must be at least 50um from padframe
areaid.ns,identifier,81:15,Non-critical side. Blocks stress DRC rules
areaid.ij,identifier,81:17,Identification for areas susceptible to injection
areaid.zr,identifier,81:18,Zener diode identifier
areaid.ed,identifier,81:19,ESD device identifier
areaid.de,identifier,81:23,Diode identifier
areaid.rd,identifier,81:24,RDL probe pad (not used in this process)
areaid.dn,identifier,81:50,Dead zone (used in seal ring only for stress DRC)
areaid.cr,identifier,81:51,Critical corner (used in seal ring only for stress DRC)
areaid.cd,identifier,81:52,Critical side (used in seal ring only for stress DRC)
areaid.st,identifier,81:53,Substrate cut. Idendifies areas to be considered as isolated substrate
areaid.op,identifier,81:54,OPC drop. Block automatic OPC (for fab blocks and lithocal structures)
areaid.en,identifier,81:57,Extended drain identifier
areaid.en20,identifier,81:58,20V Extended drain identifier
areaid.le,identifier,81:60,3.3V native NMOS identifier (absence indicates a 5V native NMOS)
areaid.hl,identifier,81:63,HV nwell. Identifies nwells with thin oxide devices connected to high voltage
areaid.sd,identifier,81:70,subcircuit identifier (for LVS extraction)
areaid.po,identifier,81:81,Photodiode device identifier
areaid.it,identifier,81:84,IP exempt from DFM rules
areaid.et,identifier,81:101,e-test module identifier
areaid.lvt,identifier,81:108,Low-Vt identifier
areaid.re,identifier,81:125,RF diode identifier
,,,
fom,dummy,22:23,
,,,
poly,gate,66:9,
,,,
poly,model,66:83,(Text type)
,,,
poly,resistor,66:13,
diff,resistor,65:13,
pwell,resistor,64:13,
li1,resistor,67:13,
,,,
diff,high voltage,65:8,
,,,
met4,fuse,71:17,
,,,
inductor,terminal1,82:26,
inductor,terminal2,82:27,
inductor,terminal3,82:28,
,,,
li1,block,67:10,
met1,block,68:10,
met2,block,69:10,
met3,block,70:10,
met4,block,71:10,
met5,block,72:10,
,,,
prBndry,boundary,235:4,
diff,boundary,65:4,
tap,boundary,65:60,
mcon,boundary,67:60,
poly,boundary,66:4,
via,boundary,68:60,
via2,boundary,69:60,
via3,boundary,70:60,
via4,boundary,71:60,
,,,
li1,label,67:5,(Text type)
met1,label,68:5,(Text type)
met2,label,69:5,(Text type)
met3,label,70:5,(Text type)
met4,label,71:5,(Text type)
met5,label,72:5,(Text type)
poly,label,66:5,(Text type)
diff,label,65:6,(Text type)
pwell,label,64:59,(Text and data type)
pwelliso,label,44:5,(Text type)
pad,label,76:5,(Text type)
tap,label,65:5,
nwell,label,64:5,
inductor,label,82:25,
,,,
text,label,83:44,(Text type)
,,,
li1,net,67:23,(Text type)
met1,net,68:23,(Text type)
met2,net,69:23,(Text type)
met3,net,70:23,(Text type)
met4,net,71:23,(Text type)
met5,net,72:23,(Text type)
poly,net,66:23,(Text type)
diff,net,65:23,(Text type)
,,,
li1,pin,67:16,(Text and data)
met1,pin,68:16,(Text and data)
met2,pin,69:16,(Text and data)
met3,pin,70:16,(Text and data)
met4,pin,71:16,(Text and data)
met5,pin,72:16,(Text and data)
poly,pin,66:16,(Text and data)
diff,pin,65:16,(Text and data)
nwell,pin,64:16,(Text type)
pad,pin,76:16,(Text and data)
pwell,pin,122:16,(Text and data)
pwelliso,pin,44:16,(Text and data)
,,,
nwell,pin,64:0,(Text type)
poly,pin,66:0,(Text type)
li1,pin,67:0,(Text type)
met1,pin,68:0,(Text type)
met2,pin,69:0,(Text type)
met3,pin,70:0,(Text type)
met4,pin,71:0,(Text type)
met5,pin,72:0,(Text type)
pad,pin,76:0,(Text type)
pwell,pin,122:0,(Text type)
,,,
diff,cut,65:14,
poly,cut,66:14,
li1,cut,67:14,
met1,cut,68:14,
met2,cut,69:14,
met3,cut,70:14,
met4,cut,71:14,
met5,cut,72:14,
pwell,cut,,
,,,
met5,probe,72:25,
met4,probe,71:25,
met3,probe,70:25,
met2,probe,69:25,
met1,probe,68:25,
li1,probe,67:25,
poly,probe,66:25,
,,,
poly,short,66:15,
li1,short,67:15,
met1,short,68:15,
met2,short,69:15,
met3,short,70:15,
met4,short,71:15,
met5,short,72:15,
,,,
Mask level data,,,
,,,
cncm,mask,17:0,N-core implant mask
crpm,mask,96:0,Resistor Protect mask
cpdm,mask,37:0,Pad mask
cnsm,mask,22:0,Nitride seal mask
cmm5,mask,59:0,Metal 5 mask
cviam4,mask,58:0,Via 4 mask
cmm4,mask,51:0,Metal 4 mask
cviam3,mask,50:0,Via 3 mask
cmm3,mask,34:0,Metal 3 mask
cviam2,mask,44:0,Via 2 mask
cmm2,mask,41:0,Metal 2 mask
cviam,mask,40:0,Via mask
cmm1,mask,36:0,Metal 1 mask
ctm1,mask,35:0,Contact mask
cli1m,mask,56:0,Local interconnect mask
clicm1,mask,43:0,Local interconnect contact mask
cpsdm,mask,32:0,P+ Implant mask
cnsdm,mask,30:0,N+ Implant mask
cldntm,mask,11:0,Lightly-doped N-tip implant mask
cnpc,mask,49:0,Nitride poly cut mask
chvntm,mask,39:0,High voltage N-tip implant mask
cntm,mask,27:0,N-tip implant mask
cp1m,mask,28:0,Poly 1 mask
clvom,mask,46:0,Low Voltage oxide mask
conom,mask,88:0,ONO Mask
ctunm,mask,20:0,Tunnel mask
chvtrm,mask,98:0,HLow VT PCh Radio mask
chvtpm,mask,97:0,High Vt Pch mask
clvtnm,mask,25:0,Low Vt Nch mask
cnwm,mask,21:0,Nwell mask
cdnm,mask,48:0,Deep nwell mask
cfom,mask,23:0,Field oxide mask
,,,
cfom,drawing,22:20,
clvtnm,drawing,25:44,
chvtpm,drawing,88:44,
conom,drawing,87:44,
clvom,drawing,45:20,
cntm,drawing,26:20,
chvntm,drawing,38:20,
cnpc,drawing,44:20,
cnsdm,drawing,29:20,
cpsdm,drawing,31:20,
cli1m,drawing,115:44,
cviam3,drawing,112:20,
cviam4,drawing,117:20,
cncm,drawing,96:44,
,,,
cntm,mask add,26:21,
clvtnm,mask add,25:43,
chvtpm,mask add,97:43,
cli1m,mask add,115:43,
clicm1,mask add,106:43,
cpsdm,mask add,31:21,
cnsdm,mask add,29:21,
cp1m,mask add,33:43,
cfom,mask add,22:21,
,,,
cntm,mask drop,26:22,
clvtnm,mask drop,25:42,
chvtpm,mask drop,97:42,
cli1m,mask drop,115:42,
clicm1,mask drop,106:42,
cpsdm,mask drop,31:22,
cnsdm,mask drop,29:22,
cp1m,mask drop,33:42,
cfom,mask drop,22:22,
,,,
cmm4,waffle drop,112:4,
cmm3,waffle drop,107:24,
cmm2,waffle drop,105:52,
cmm1,waffle drop,62:24,
cp1m,waffle drop,33:24,
cfom,waffle drop,22:24,
cmm5,waffle drop,117:4,
1 Layer name Purpose GDS layer:datatype Description
2 diff drawing, text 65:20 Active (diffusion) area (type opposite of well/substrate underneath)
3 tap drawing 65:44 Active (diffusion) area (type equal to the well/substrate underneath) (i.e., N+ and P+)
4 nwell drawing 64:20 N-well region
5 dnwell drawing 64:18 Deep n-well region
6 pwbm drawing 19:44 Regions (in UHVI) blocked from p-well implant (DE MOS devices only)
7 pwde drawing 124:20 Regions to receive p-well drain-extended implants
8 hvtr drawing 18:20 High-Vt RF transistor implant
9 hvtp drawing 78:44 High-Vt LVPMOS implant
10 ldntm drawing 11:44 N-tip implant on SONOS devices
11 hvi drawing 75:20 High voltage (5.0V) thick oxide gate regions
12 tunm drawing 80:20 SONOS device tunnel implant
13 lvtn drawing 125:44 Low-Vt NMOS device
14 poly drawing, text 66:20 Polysilicon
15 hvntm drawing 125:20 High voltage N-tip implant
16 nsdm drawing 93:44 N+ source/drain implant
17 psdm drawing 94:20 P+ source/drain implant
18 rpm drawing 86:20 300 ohms/square polysilicon resistor implant
19 urpm drawing 79:20 2000 ohms/square polysilicon resistor implant
20 npc drawing 95:20 Nitride poly cut (under licon1 areas)
21 licon1 drawing 66:44 Contact to local interconnect
22 li1 drawing, text 67:20 Local interconnect
23 mcon drawing 67:44 Contact from local interconnect to metal1
24 met1 drawing, text 68:20 Metal 1
25 via drawing 68:44 Contact from metal 1 to metal 2
26 met2 drawing, text 69:20 Metal 2
27 via2 drawing 69:44 Contact from metal 2 to metal 3
28 met3 drawing, text 70:20 Metal 3
29 via3 drawing 70:44 Contact from metal 3 to metal 4
30 met4 drawing, text 71:20 Metal 4
31 via4 drawing 71:44 Contact from metal 4 to metal 5
32 met5 drawing, text 72:20 Metal 5
33 pad drawing, text 76:20 Passivation cut (opening over pads)
34 nsm drawing 61:20 Nitride seal mask
35 capm drawing 89:44 MiM capacitor plate over metal 3
36 cap2m drawing 97:44 MiM capacitor plate over metal 4
37 vhvi drawing 74:21 12V nominal (16V max) node identifier
38 uhvi drawing 74:22 20V nominal node identifier
39 npn drawing 82:20 Base region identifier for NPN devices
40 inductor drawing 82:24 Identifier for inductor regions
41 capacitor drawing 82:64 Identifier for interdigitated (vertical parallel plate (vpp)) capacitors
42 pnp drawing 82:44 Base nwell region identifier for PNP devices
43 LVS prune drawing 84:44 Exemption from LVS check (used in e-test modules only)
44 ncm drawing 92:44 N-core implant
45 padCenter drawing 81:20 Pad center marker
46 target drawing 76:44 Metal fuse target
47
48 areaid.sl identifier 81:1 Seal ring identifier
49 areaid.ce identifier 81:2 Memory (SRAM) core cell identifier
50 areaid.fe identifier 81:3 Pads in padframe identifier
51 areaid.sc identifier 81:4 Standard cell identifier
52 areaid.sf identifier 81:6 Signal pad diffusion identifier (for latchup DRC checks)
53 areaid.sl identifier 81:7 Signal pad well identifier (for latchup DRC checks)
54 areaid.sr identifier 81:8 Signal pad metal (for latchup DRC checks)
55 areaid.mt identifier 81:10 Location of e-test modules within the frame
56 areaid.dt identifier 81:11 Location of dice within the frame
57 areaid.ft identifier 81:12 Boundary of the frame
58 areaid.ww identifier 81:13 Waffle window (used to prevent waffle shifting)
59 areaid.ld identifier 81:14 Low tap density (15um between taps) area. Must be at least 50um from padframe
60 areaid.ns identifier 81:15 Non-critical side. Blocks stress DRC rules
61 areaid.ij identifier 81:17 Identification for areas susceptible to injection
62 areaid.zr identifier 81:18 Zener diode identifier
63 areaid.ed identifier 81:19 ESD device identifier
64 areaid.de identifier 81:23 Diode identifier
65 areaid.rd identifier 81:24 RDL probe pad (not used in this process)
66 areaid.dn identifier 81:50 Dead zone (used in seal ring only for stress DRC)
67 areaid.cr identifier 81:51 Critical corner (used in seal ring only for stress DRC)
68 areaid.cd identifier 81:52 Critical side (used in seal ring only for stress DRC)
69 areaid.st identifier 81:53 Substrate cut. Idendifies areas to be considered as isolated substrate
70 areaid.op identifier 81:54 OPC drop. Block automatic OPC (for fab blocks and lithocal structures)
71 areaid.en identifier 81:57 Extended drain identifier
72 areaid.en20 identifier 81:58 20V Extended drain identifier
73 areaid.le identifier 81:60 3.3V native NMOS identifier (absence indicates a 5V native NMOS)
74 areaid.hl identifier 81:63 HV nwell. Identifies nwells with thin oxide devices connected to high voltage
75 areaid.sd identifier 81:70 subcircuit identifier (for LVS extraction)
76 areaid.po identifier 81:81 Photodiode device identifier
77 areaid.it identifier 81:84 IP exempt from DFM rules
78 areaid.et identifier 81:101 e-test module identifier
79 areaid.lvt identifier 81:108 Low-Vt identifier
80 areaid.re identifier 81:125 RF diode identifier
81
82 fom dummy 22:23
83
84 poly gate 66:9
85
86 poly model 66:83 (Text type)
87
88 poly resistor 66:13
89 diff resistor 65:13
90 pwell resistor 64:13
91 li1 resistor 67:13
92
93 diff high voltage 65:8
94
95 met4 fuse 71:17
96
97 inductor terminal1 82:26
98 inductor terminal2 82:27
99 inductor terminal3 82:28
100
101 li1 block 67:10
102 met1 block 68:10
103 met2 block 69:10
104 met3 block 70:10
105 met4 block 71:10
106 met5 block 72:10
107
108 prBndry boundary 235:4
109 diff boundary 65:4
110 tap boundary 65:60
111 mcon boundary 67:60
112 poly boundary 66:4
113 via boundary 68:60
114 via2 boundary 69:60
115 via3 boundary 70:60
116 via4 boundary 71:60
117
118 li1 label 67:5 (Text type)
119 met1 label 68:5 (Text type)
120 met2 label 69:5 (Text type)
121 met3 label 70:5 (Text type)
122 met4 label 71:5 (Text type)
123 met5 label 72:5 (Text type)
124 poly label 66:5 (Text type)
125 diff label 65:6 (Text type)
126 pwell label 64:59 (Text and data type)
127 pwelliso label 44:5 (Text type)
128 pad label 76:5 (Text type)
129 tap label 65:5
130 nwell label 64:5
131 inductor label 82:25
132
133 text label 83:44 (Text type)
134
135 li1 net 67:23 (Text type)
136 met1 net 68:23 (Text type)
137 met2 net 69:23 (Text type)
138 met3 net 70:23 (Text type)
139 met4 net 71:23 (Text type)
140 met5 net 72:23 (Text type)
141 poly net 66:23 (Text type)
142 diff net 65:23 (Text type)
143
144 li1 pin 67:16 (Text and data)
145 met1 pin 68:16 (Text and data)
146 met2 pin 69:16 (Text and data)
147 met3 pin 70:16 (Text and data)
148 met4 pin 71:16 (Text and data)
149 met5 pin 72:16 (Text and data)
150 poly pin 66:16 (Text and data)
151 diff pin 65:16 (Text and data)
152 nwell pin 64:16 (Text type)
153 pad pin 76:16 (Text and data)
154 pwell pin 122:16 (Text and data)
155 pwelliso pin 44:16 (Text and data)
156
157 nwell pin 64:0 (Text type)
158 poly pin 66:0 (Text type)
159 li1 pin 67:0 (Text type)
160 met1 pin 68:0 (Text type)
161 met2 pin 69:0 (Text type)
162 met3 pin 70:0 (Text type)
163 met4 pin 71:0 (Text type)
164 met5 pin 72:0 (Text type)
165 pad pin 76:0 (Text type)
166 pwell pin 122:0 (Text type)
167
168 diff cut 65:14
169 poly cut 66:14
170 li1 cut 67:14
171 met1 cut 68:14
172 met2 cut 69:14
173 met3 cut 70:14
174 met4 cut 71:14
175 met5 cut 72:14
176 pwell cut
177
178 met5 probe 72:25
179 met4 probe 71:25
180 met3 probe 70:25
181 met2 probe 69:25
182 met1 probe 68:25
183 li1 probe 67:25
184 poly probe 66:25
185
186 poly short 66:15
187 li1 short 67:15
188 met1 short 68:15
189 met2 short 69:15
190 met3 short 70:15
191 met4 short 71:15
192 met5 short 72:15
193
194 Mask level data
195
196 cncm mask 17:0 N-core implant mask
197 crpm mask 96:0 Resistor Protect mask
198 cpdm mask 37:0 Pad mask
199 cnsm mask 22:0 Nitride seal mask
200 cmm5 mask 59:0 Metal 5 mask
201 cviam4 mask 58:0 Via 4 mask
202 cmm4 mask 51:0 Metal 4 mask
203 cviam3 mask 50:0 Via 3 mask
204 cmm3 mask 34:0 Metal 3 mask
205 cviam2 mask 44:0 Via 2 mask
206 cmm2 mask 41:0 Metal 2 mask
207 cviam mask 40:0 Via mask
208 cmm1 mask 36:0 Metal 1 mask
209 ctm1 mask 35:0 Contact mask
210 cli1m mask 56:0 Local interconnect mask
211 clicm1 mask 43:0 Local interconnect contact mask
212 cpsdm mask 32:0 P+ Implant mask
213 cnsdm mask 30:0 N+ Implant mask
214 cldntm mask 11:0 Lightly-doped N-tip implant mask
215 cnpc mask 49:0 Nitride poly cut mask
216 chvntm mask 39:0 High voltage N-tip implant mask
217 cntm mask 27:0 N-tip implant mask
218 cp1m mask 28:0 Poly 1 mask
219 clvom mask 46:0 Low Voltage oxide mask
220 conom mask 88:0 ONO Mask
221 ctunm mask 20:0 Tunnel mask
222 chvtrm mask 98:0 HLow VT PCh Radio mask
223 chvtpm mask 97:0 High Vt Pch mask
224 clvtnm mask 25:0 Low Vt Nch mask
225 cnwm mask 21:0 Nwell mask
226 cdnm mask 48:0 Deep nwell mask
227 cfom mask 23:0 Field oxide mask
228
229 cfom drawing 22:20
230 clvtnm drawing 25:44
231 chvtpm drawing 88:44
232 conom drawing 87:44
233 clvom drawing 45:20
234 cntm drawing 26:20
235 chvntm drawing 38:20
236 cnpc drawing 44:20
237 cnsdm drawing 29:20
238 cpsdm drawing 31:20
239 cli1m drawing 115:44
240 cviam3 drawing 112:20
241 cviam4 drawing 117:20
242 cncm drawing 96:44
243
244 cntm mask add 26:21
245 clvtnm mask add 25:43
246 chvtpm mask add 97:43
247 cli1m mask add 115:43
248 clicm1 mask add 106:43
249 cpsdm mask add 31:21
250 cnsdm mask add 29:21
251 cp1m mask add 33:43
252 cfom mask add 22:21
253
254 cntm mask drop 26:22
255 clvtnm mask drop 25:42
256 chvtpm mask drop 97:42
257 cli1m mask drop 115:42
258 clicm1 mask drop 106:42
259 cpsdm mask drop 31:22
260 cnsdm mask drop 29:22
261 cp1m mask drop 33:42
262 cfom mask drop 22:22
263
264 cmm4 waffle drop 112:4
265 cmm3 waffle drop 107:24
266 cmm2 waffle drop 105:52
267 cmm1 waffle drop 62:24
268 cp1m waffle drop 33:24
269 cfom waffle drop 22:24
270 cmm5 waffle drop 117:4

10
docs/rules/gds_layers.rst Normal file
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SkyWater GDS Layers Information
===============================
The :download:`gds_layers.csv file <./gds_layers.csv>` provides a raw list of the
layers used in the process with name, description and the GDS layer and data type.
.. csv-table:: Table - GDS Layers
:file: gds_layers.csv
:header-rows: 1
:widths: 10, 15, 10, 75