10 lines
323 B
Plaintext
10 lines
323 B
Plaintext
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Symbol,Explanation,Unit
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PI,Perimeter of Interconnect,um
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FLT,Final Layer thickness,um
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W,Width of MOS Transistor,um
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L,Length of MOS Transistor,um
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A,Area of MOS Transistor gate (= W x L),um2
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CA,Area of contact or via,um2
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SW,Sidewall area (= PI x FLT),um2
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EA,"Etched area (= CA for horizontal, = SW for vertical areas)",um2
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