132 lines
1.8 KiB
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132 lines
1.8 KiB
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.. list-table::
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:header-rows: 1
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:stub-columns: 1
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* - Parameter
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- NOM
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- LSL
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- USL
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- Units
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- Description
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* - RSN
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- 120
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- 108
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- 132
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- Ω/□
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- N+ diffusion sheet resistance
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* - RSNH
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- 114
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- 102
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- 126
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- Ω/□
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- HV N+ diffusion sheet resistance
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* - RSNW
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- 950
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- 550
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- 1350
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- Ω/□
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- N-Well sheet resistance
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* - RSP
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- 197
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- 166
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- 228
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- Ω/□
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- P+ diffusion sheet resistance
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* - RSPH
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- 191
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- 160
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- 228
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- Ω/□
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- HV P+ diffusion sheet resistance
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* - RSPW
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- 3050
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- 2565
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- 3535
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- Ω/□
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- P-Well sheet resistance
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* - RSDNW
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- 2200
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- 1825
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- 2575
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- Ω/□
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- Deep N-Well sheet resistance
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* - WN
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- 0.157
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- 0.088
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- 0.226
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- µm
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- Electrical N+ linewidth (drawn 0.14)
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* - WP
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- 0.144
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- 0.084
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- 0.204
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- µm
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- Electrical P+ linewidth (drawn 0.14)
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* - RSGPVDP
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- 48.2
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- 42.2
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- 55.8
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- Ω/□
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- poly sheet resistance, with NGNIT
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* - WGPUC15
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- 0.094
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- 0.053
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- 0.135
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- µm
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- Electrical poly linewidth (drawn 0.15)
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* - RSLI
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- 12.8
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- 9.2
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- 17.0
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- Ω/□
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- Local interconnect sheet resistance
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* - RSM1
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- 0.125
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- 0.105
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- 0.145
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- Ω/□
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- Metal-1 sheet resistance
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* - RSM2
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- 0.125
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- 0.105
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- 0.145
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- Ω/□
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- Metal-2 sheet resistance
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* - RSM3
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- 0.047
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- 0.038
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- 0.056
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- Ω/□
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- Metal-3 sheet resistance
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* - RSM4
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- 0.047
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- 0.038
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- 0.056
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- Ω/□
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- Metal-4 sheet resistance
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* - RSM5
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- 0.0285
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- 0.0212
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- 0.0358
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- Ω/□
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- Metal-5 sheet resistance
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