The MiM capacitor is constructed using a thin dielectric over metal, followed by a thin conductor layer on top of the dielectric. There are two possible constructions:
- CAPM over Metal-3
- CAP2M over Metal-4
The constructions are identical, and the capacitors may be stacked to maximize total capacitance.
The symbol for the MiM capacitor is shown below. Note that the cap model is a sub-circuit which accounts for the parasitic contact resistance and the parasitic capacitance from the bottom plate to substrate.