diff --git a/src/target/armv7m.c b/src/target/armv7m.c
index ccb3e5456..15de8cd9c 100644
--- a/src/target/armv7m.c
+++ b/src/target/armv7m.c
@@ -622,6 +622,34 @@ struct reg_cache *armv7m_build_reg_cache(struct target *target)
 	return cache;
 }
 
+void armv7m_free_reg_cache(struct target *target)
+{
+	struct armv7m_common *armv7m = target_to_armv7m(target);
+	struct arm *arm = &armv7m->arm;
+	struct reg_cache *cache;
+	struct reg *reg;
+	unsigned int i;
+
+	cache = arm->core_cache;
+
+	if (!cache)
+		return;
+
+	for (i = 0; i < cache->num_regs; i++) {
+		reg = &cache->reg_list[i];
+
+		free(reg->feature);
+		free(reg->reg_data_type);
+		free(reg->value);
+	}
+
+	free(cache->reg_list[0].arch_info);
+	free(cache->reg_list);
+	free(cache);
+
+	arm->core_cache = NULL;
+}
+
 static int armv7m_setup_semihosting(struct target *target, int enable)
 {
 	/* nothing todo for armv7m */
diff --git a/src/target/armv7m.h b/src/target/armv7m.h
index 19744604e..4ecf102c5 100644
--- a/src/target/armv7m.h
+++ b/src/target/armv7m.h
@@ -186,6 +186,8 @@ struct armv7m_algorithm {
 };
 
 struct reg_cache *armv7m_build_reg_cache(struct target *target);
+void armv7m_free_reg_cache(struct target *target);
+
 enum armv7m_mode armv7m_number_to_mode(int number);
 int armv7m_mode_to_number(enum armv7m_mode mode);
 
diff --git a/src/target/cortex_m.c b/src/target/cortex_m.c
index 2cb83a496..87956717d 100644
--- a/src/target/cortex_m.c
+++ b/src/target/cortex_m.c
@@ -1694,7 +1694,10 @@ void cortex_m_deinit_target(struct target *target)
 	struct cortex_m_common *cortex_m = target_to_cm(target);
 
 	free(cortex_m->fp_comparator_list);
+
 	cortex_m_dwt_free(target);
+	armv7m_free_reg_cache(target);
+
 	free(cortex_m);
 }
 
@@ -1924,10 +1927,14 @@ int cortex_m_examine(struct target *target)
 		    armv7m->arm.core_cache->num_regs > ARMV7M_NUM_CORE_REGS_NOFP) {
 			/* free unavailable FPU registers */
 			size_t idx;
+
 			for (idx = ARMV7M_NUM_CORE_REGS_NOFP;
 			     idx < armv7m->arm.core_cache->num_regs;
-			     idx++)
+			     idx++) {
 				free(armv7m->arm.core_cache->reg_list[idx].value);
+				free(armv7m->arm.core_cache->reg_list[idx].feature);
+				free(armv7m->arm.core_cache->reg_list[idx].reg_data_type);
+			}
 			armv7m->arm.core_cache->num_regs = ARMV7M_NUM_CORE_REGS_NOFP;
 		}